Israel A Boniche

US Patent:

20110155202, Jun 30, 2011

Filed:

Sep 11, 2009

Appl. No.:

13/061422

Inventors:

David Patrick Arnold - Gainesville FL, US
Israel Boniche - Rio Rancho NM, US
Christopher David Meyer - Bethesda MD, US
Sivaraman Masilamani - Northborough MA, US

Assignee:

University of Florida Research Foundation, Inc. - Gainsville FL

International Classification:

H01L 35/32
H01L 35/34

US Classification:

136224, 136201

Abstract:

The subject invention pertains to thermoelectric power generation. According to certain embodiments, a stack of silicon-micromachined chips can be connected to form a cylindrical heat exchanger that enables a large, uniform temperature difference across a radially-oriented thermopile. Each layer in the stack can comprise two thermally-isolated concentric silicon rings connected by a polyimide membrane that supports patterned thermoelectric thin films. The polyimide membrane can be formed by selectively etching away the supporting silicon, resulting in thermally-isolated inner and outer rings. In operation, hot gas can flow through a finned central channel, and an external cross flow can enhance heat transfer to ambient to keep the outer surfaces cool. The resulting temperature gradient across the thermopile generates a voltage potential across the open ends due to the Seebeck effect. When connected to a load, current flows, and electrical power is supplied by the generated voltage potential caused by the temperature gradient.