Dr. Dang graduated from the Rosalind Franklin University/ Chicago Medical School in 2003. He works in Fontana, CA and specializes in Neurology. Dr. Dang is affiliated with Kaiser Permanente Fontana Medical Center.
Siqing Lu - San Jose CA, US Yu Chang - San Jose CA, US Dongxi Sun - Cupertino CA, US Vinh Dang - San Jose CA, US Michael X. Yang - Palo Alto CA, US Anzhong (Andrew) Chang - San Jose CA, US Anh N. Nguyen - Milpitas CA, US Ming Xi - Milpitas CA, US
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
B05C 11/00
US Classification:
118710
Abstract:
A valve control system for a semiconductor processing chamber includes a system control computer and a plurality of electrically controlled valves associated with the processing chamber. The system further includes a programmable logic controller in communication with the system control computer and operatively coupled to the electrically controlled valves. The refresh time for control of the valves may be less than 10 milliseconds. Consequently, valve control operations do not significantly extend the period of time required for highly repetitive cycling in atomic layer deposition processes. A hardware interlock may be implemented through the output power supply of the programmable logic controller.
Valve Control System For Atomic Layer Deposition Chamber
Siqing Lu - San Jose CA, US Yu Chang - San Jose CA, US Dongxi Sun - Cupertino CA, US Vinh Dang - San Jose CA, US Michael Yang - Palo Alto CA, US Anzhong Chang - San Jose CA, US Anh Nguyen - Milpitas CA, US Ming Xi - Milpitas CA, US
International Classification:
H01L021/66 G01R031/26 C23F001/00 C23C016/00
US Classification:
438/014000, 156/345260, 118/715000, 118/712000
Abstract:
A valve control system for a semiconductor processing chamber includes a system control computer and a plurality of electrically controlled valves associated with the processing chamber. The system further includes a programmable logic controller in communication with the system control computer and operatively coupled to the electrically controlled valves. The refresh time for control of the valves may be less than 10 milliseconds. Consequently, valve control operations do not significantly extend the period of time required for highly repetitive cycling in atomic layer deposition processes. A hardware interlock may be implemented through the output power supply of the programmable logic controller.
Name / Title
Company / Classification
Phones & Addresses
Vinh Dang Project Manager
Alto Gilead Palo Inc Mfg Pharmaceutical Preparations Commercial Physical Research
Handy Elementary School Orange CA 1982-1985, Faylane Elementary School Garden Grove CA 1985-1989, Walter C. Ralston Intermediate School Garden Grove CA 1989-1990