Jong W Yoo

US Patent:

7695563, Apr 13, 2010

Filed:

Jan 8, 2007

Appl. No.:

11/621040

Inventors:

Xinliang Lu - Sunnyvale CA, US
Ping Jian - San Jose CA, US
Jong Hyun Yoo - Milpitas CA, US
Ken Kaung Lai - Milpitas CA, US
Alfred W. Mak - Union City CA, US
Robert L. Jackson - San Jose CA, US
Ming Xi - Milpitas CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

C30B 25/14

US Classification:

117 89, 117 86, 117 90, 117 92

Abstract:

In one embodiment, a method for depositing a tungsten material on a substrate within a process chamber is provided which includes exposing the substrate to a gaseous mixture containing a tungsten precursor and a reducing gas to deposit a tungsten nucleation layer on the substrate during a tungsten deposition process. The process further includes removing reaction by-products generated during the tungsten deposition process from the process chamber, exposing the substrate to the reducing gas to react with residual tungsten precursor within the process chamber during a soak process, removing reaction by-products generated during the soak process from the process chamber, and repeating the tungsten deposition process and the soak process during a cyclic deposition process. In the examples, the reducing gas may contain diborane or silane.

US Patent:

8199321, Jun 12, 2012

Filed:

May 5, 2009

Appl. No.:

12/435970

Inventors:

Jong Hyun Yoo - Milpitas CA, US
Randolph S. Tribe - San Jose CA, US
Chunyi Liu - Union City CA, US

Assignee:

Applied Spectra, Inc. - Fremont CA

International Classification:

G01J 3/443
G01N 21/63

US Classification:

356318, 356326, 356 72

Abstract:

Provided is a laser ablation spectroscopy apparatus and method. A pulse laser is focused on the sample site to generate a plasma plume during a laser ablation process. The plasma plume is detected with a spectrometer and an intensified charge coupled device. A sample of material is coupled to a stage movable in the x, y and z directions using an array of x-y-z motors. A change in the height of the sample is detected using a triangulation sensor. The apparatus includes a system computer for synchronizing the movement of the stage in the x, y and z direction during the laser ablation process. The method includes a protocol of generating one or more laser ablations per sample site. The spectral data of the total number of laser ablations for each sample site are averaged together. The protocol includes laser ablating additional sample sites and averaging the spectral data of the total number of sample sites.

US Patent:

20070009658, Jan 11, 2007

Filed:

Dec 17, 2001

Appl. No.:

10/023125

Inventors:

Jong Yoo - Milpitas CA, US
Xinliang Lu - Sunnyvale CA, US
Chiliang Chen - Sunnyvale CA, US
Ken Lai - Milpitas CA, US

International Classification:

C23C 16/00

US Classification:

427248100, 118715000, 118697000

Abstract:

A process and an apparatus is disclosed for forming refractory metal layers employing pulse nucleation to minimize formation of a concentration boundary layer during nucleation. The surface of a substrate is nucleated in several steps. Following each nucleation step is a removal step in which all reactants and by-products of the nucleation process are removed from the processing chamber. Removal may be done by either rapidly evacuating the processing chamber, rapidly introducing a purge gas therein or both. After removal of the process gas and by-products from the processing chamber, additional nucleation steps may be commenced to obtain a nucleation layer of desired thickness. After formation of the nucleation layer, a layer is formed adjacent to the nucleation layer using standard bulk deposition techniques.

US Patent:

20110100967, May 5, 2011

Filed:

Nov 3, 2010

Appl. No.:

12/939095

Inventors:

Jong Hyun Yoo - Milpitas CA, US

Assignee:

APPLIED SPECTRA, INC. - Fremont CA

International Classification:

B23K 26/02
B23K 26/06

US Classification:

21912173, 21912183

Abstract:

A method for real-time optical diagnostics in laser ablation and laser processing of layered or structured materials or material structures. Diagnostics is provided during laser ablation that is utilized regularly in laser processing and/or chemical analysis of structured materials, by means of measuring optical emission generated as a result of the pulsed laser-material interaction in real time. The method can involve a single-layer-film or a stack of multiple layers or a structure of different domains. The method is particularly beneficial in fabrication of thin-film structures, such as photovoltaic and electronic devices or circuits of devices.

US Patent:

7211144, May 1, 2007

Filed:

Jul 12, 2002

Appl. No.:

10/194629

Inventors:

Xinliang Lu - Sunnyvale CA, US
Ping Jian - San Jose CA, US
Jong Hyun Yoo - Milpitas CA, US
Ken Kaung Lai - Milpitas CA, US
Alfred W. Mak - Union City CA, US
Robert L. Jackson - San Jose CA, US
Ming Xi - Milpitas CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

C30B 25/16

US Classification:

117101, 117 85, 117 86, 117 89, 117102, 117105

Abstract:

A method of forming a tungsten nucleation layer using a sequential deposition process. The tungsten nucleation layer is formed by reacting pulses of a tungsten-containing precursor and a reducing gas in a process chamber to deposit tungsten on the substrate. Thereafter, reaction by-products generated from the tungsten deposition are removed from the process chamber. After the reaction by-products are removed from the process chamber, a flow of the reducing gas is provided to the process chamber to react with residual tungsten-containing precursor remaining therein. Such a deposition process forms tungsten nucleation layers having good step coverage. The sequential deposition process of reacting pulses of the tungsten-containing precursor and the reducing gas, removing reaction by-products, and than providing a flow of the reducing gas to the process chamber may be repeated until a desired thickness for the tungsten nucleation layer is formed.

US Patent:

20210341392, Nov 4, 2021

Filed:

Jul 2, 2021

Appl. No.:

17/366023

Inventors:

- West Sacramento CA, US
Chunyi Liu - Fremont CA, US
Jong Hyun Yoo - Sacramento CA, US
Sudeep J. Pandey - Sacramento CA, US
Richard E. Russo - Walnut Creek CA, US
Randolph S. Tribe - San Jose CA, US

Assignee:

Applied Spectra, Inc. - West Sacramento CA

International Classification:

G01N 21/71
H01J 49/00
B23K 26/04
H01J 49/10
H01J 49/04

Abstract:

Methods for laser induced ablation spectroscopy (LIBS) are disclosed. Light from laser ablation can be gathered into a lightguide fiber bundle that is subdivided into branches. One branch can convey a first portion of the light to a broadband spectrometer operable to analyze a relatively wide spectral segment, and a different branch can convey a second portion of the light to a high dispersion spectrometer operable to measure minor concentrations and/or trace elements. Emissions can be analyzed using a plurality of spectrometers having distinct and/or complementary capabilities, and with a synergistic method using inductively coupled plasma mass spectrometry.