Emily M Hwang

US Patent:

7398172, Jul 8, 2008

Filed:

May 31, 2006

Appl. No.:

11/421082

Inventors:

Gary W. Behm - Hopewell Junction NY, US
Emily M. Hwang - Hopewell Junction NY, US
Yue J. Li - Hopewell Junction NY, US
Teresita Q. Magtoto - Poughkeepsie NY, US
Derek C. Stoll - Hopewell Junction NY, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G06F 15/00

US Classification:

702 83, 382149

Abstract:

A method and system of providing a dynamic sampling plan for integrated metrology is disclosed. The method may include modeling a sampling plan for use with a factory level advanced processing control (FL-APC) system and sending a recommended sampling plan, in response to receiving a request for a sampling plan, wherein the recommended sampling plan is based upon the modeling and the request. The recommended sampling plan may be sent to an equipment interface (EI) and on to a tool for implementation in a manufacturing environment.

US Patent:

7489980, Feb 10, 2009

Filed:

Jul 27, 2006

Appl. No.:

11/460450

Inventors:

Gary W Behm - Hopewell Junction NY, US
Emily M Hwang - Hopewell Junction NY, US
Yue Li - Hopewell Junction NY, US
Teresita Q Magtoto - Poughkeepsie NY, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G06F 19/00

US Classification:

700 96, 700121

Abstract:

Integration of factory level advanced process control (FL-APC) system and tool level advanced process control (TL-APC) system using selectable APC operation modes indicating different operational settings for the FL-APC system and at least one TL-APC system is disclosed. During operation, the FL-APC system controls operation of the TL-APC system. The invention allows a manufacturing execution system (MES) to have additional capability to run the process control functions at FL-APC system and/or TL-APC system, and allows integration of a variety of different tools with a TL-APC system. An implementation method, system and program product are also disclosed.

US Patent:

7577537, Aug 18, 2009

Filed:

Mar 18, 2008

Appl. No.:

12/050425

Inventors:

Gary W. Behm - Hopewell Junction NY, US
Emily M. Hwang - Hopewell Junction NY, US
Yue J. Li - Hopewell Junction NY, US
Teresita Q. Magtoto - Poughkeepsie NY, US
Derek C. Stoll - Hopewell Junction NY, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G06F 15/00

US Classification:

702 83, 382149

Abstract:

A computer program product and system of providing a dynamic sampling plan for integrated metrology is disclosed. The computer program product may include a computer readable medium that includes a computer readable program, wherein the computer readable program when executed on a computer causes the computer to: model a sampling plan for use with a factory level advanced processing control (FL-APC) system; receive a request for a sampling plan; and send a recommended sampling plan, based upon the request and the modeling. The recommended sampling plan may be sent to an equipment interface (EI) and on to a tool for implementation in a manufacturing environment.

US Patent:

7899566, Mar 1, 2011

Filed:

Jan 2, 2009

Appl. No.:

12/348026

Inventors:

Gary W. Behm - Hopewell Junction NY, US
Emily M. Hwang - Hopewell Junction NY, US
Yue Li - Hopewell Junction NY, US
Teresita Q. Magtoto - Poughkeepsie NY, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G06F 19/00

US Classification:

700 96, 700121

Abstract:

Integration of factory level advanced process control (FL-APC) system and tool level advanced process control (TL-APC) system using selectable APC operation modes indicating different operational settings for the FL-APC system and at least one TL-APC system is disclosed. During operation, the FL-APC system controls operation of the TL-APC system. The invention allows a manufacturing execution system (MES) to have additional capability to run the process control functions at FL-APC system and/or TL-APC system, and allows integration of a variety of different tools with a TL-APC system. An implementation method, system and program product are also disclosed.

US Patent:

7113845, Sep 26, 2006

Filed:

Aug 9, 2005

Appl. No.:

11/161603

Inventors:

Gary W. Behm - Hopewell Junction NY, US
Yue Li - Hopewell Junction NY, US
Emily M. Hwang - Wappingers Falls NY, US
Teresita Q. Magtoto - Poughkeepsie NY, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G06F 19/00

US Classification:

700169, 700121

Abstract:

Integration of factory level advanced process control (FL-APC) system and tool level advanced process control (TL-APC) system using selectable APC operation modes indicating different operational settings for the FL-APC system and at least one TL-APC system is disclosed. During operation, the FL-APC system controls operation of the TL-APC system. The invention allows a manufacturing execution system (MES) to have additional capability to run the process control functions at FL-APC system and/or TL-APC system, and allows integration of a variety of different tools with a TL-APC system.