Delroy Oratio Walker

US Patent:

50217046, Jun 4, 1991

Filed:

Feb 21, 1990

Appl. No.:

7/482534

Inventors:

Delroy O. Walker - Hyattsville MD
Demetri P. Telionis - Blacksburg VA

Assignee:

Fusion Systems Corporation - Rockville MD

International Classification:

H01J 726
H01J 6152

US Classification:

313 35

Abstract:

Apparatus for cooling the lamp envelope of an electrodeless lamp which includes a conduit for carrying cooling gas into the vicinity of the lamp envelope and directing the cooling gas towards the lamp envelope through a slotted orifice in a wall of the conduit. The slotted orifice is preferably oriented with its long dimension substantially perpendicular to the conduct orifice and substantially parallel to the axis of a rotating lamp envelope.

US Patent:

56740395, Oct 7, 1997

Filed:

Aug 21, 1996

Appl. No.:

8/700997

Inventors:

Delroy Walker - Springdale MD
Joseph Zihmer - Frederick MD
Danny Furches - Columbia MD
Christopher J. Garmer - Rockville MD

Assignee:

Fusion Systems Corporation - Rockville MD

International Classification:

B65G 104

US Classification:

414222

Abstract:

A SMIF system for transferring semiconductor wafers between two controlled environments, one being within a wafer cassette carrier and the other being within an enclosure around a wafer processing apparatus. In a carrier loading position, a carrier door rests on a port door which forms part of a platform for vertically fixing and horizontally moving the cassette within the enclosure. A carrier cover, when unlocked from the carrier door, is engageable by a port plate for vertical movement therewith as an elevator mechanism moves the port plate between down and up positions. In the down position, the port door closes an enclosure opening defined by the port plate. In the up position, the port plate raises the carrier cover to allow access to the wafers in the cassette by an article processing apparatus. External and internal panels carried by the port plate cause the controlled environment of the enclosure to be extended to include a compartment containing the uncovered cassette. The cassette platform also rotates to position the cassette relative to the article processing apparatus.