Ian Clarkson - Huntington NY Bruce Abel - Sayville NY Douglas W. Sedgley - Bethpage NY
Assignee:
Grumman Aerospace Corporation - Bethpage NY
International Classification:
B01D 800
US Classification:
62 555
Abstract:
A regenerable cryosorption pump with a movable physical barrier in which the barrier includes a cylindrical body closed at one end and having a circumferential baffle around the open end. The baffle engages a flange on the hydrogen isotope condensing and pumping surface to require all gases entering the pump during normal operation to pass through the hydrogen isotope condensing and pumping surface, thus avoiding bypass of that surface. The barrier is advanced by a bellows system to isolate the hydrogen isotope condensing and pumping surface from the sorbent surface during regeneration and thus ensuring separation of hydrogen isotopes such as tritium from helium which is sorbed onto the sorbent surface.
Method And Apparatus For Adjustably Supporting A Light Source For Use In Photolithography
Edwin G. Haas - Sayville NY Vincent A. Christina - Shoreham NY Richard A. Hartley - Burlington Township NJ Bruce D. Abel - Sayville NY Alan M. M. Todd - Princeton Junction NJ
Assignee:
Advanced Energy Systems, Inc. - Bethpage NY
International Classification:
H01J 3526
US Classification:
2504922
Abstract:
A method and apparatus for producing extreme ultra-violet light comprising a nozzle for flowing a gas at a supersonic velocity, a source for directing a radiated energy beam into the flowing gas to stimulate emission of extreme ultra-violet light therefrom, and optionally a diffuser for capturing a substantial portion of the gas so that the gas may be recycled in a closed-loop system. The extreme ultra-violet light so produced is suitable for use in photolithography for integrated circuit fabrication and the like. A remotely-controlled XYZ micro-positioning stage facilitates alignment of the nozzle and the diffuser to the radiated energy beam.
Bruce Abel is an American bass. [edit] Biography. Abel studied singing at the Juilliard School of Music in New York City under Hans Heinz, where he excelled in ...