BPP Law School, London, 2005; Dalian Maritime University, 1999; Dalian Maritime University, 1999; Law School of Dalian Maritime University, 2002; University of Hong Kong, 2008
Law School:
Faculty of Laws, University College London, LL.M., 2003
ü Thenappan - München NJ, US Chien-Wei Li - Vienna VA, US David Nalewajek - West Seneca NY, US Martin Cheney - Hamburg NY, US Jingyu Lao - Saline MI, US Eric Eisenbraun - Albany NY, US Min Li - Troy MI, US Nathaniel Berliner - Albany NY, US Mikko Ritala - Espoo, FI Markku Leskela - Espoo, FI kaupo Kukli - Polva, EE Linda Cheney - Hamburg NY, US
Vapor deposition precursors that can deposit conformal thin ruthenium films on substrates with a very high growth rate, low resistivity and low levels of carbon, oxygen and nitrogen impurities have been provided. The precursors described herein include a compound having the formula CMC′, wherein M comprises a metal or a metalloid; C comprises a substituted or unsubstituted acyclic alkene, cycloalkene or cycloalkene-like ring structure; and C′ comprises a substituted or unsubstituted acyclic alkene, cycloalkene or cycloalkene-like ring structure; wherein at least one of C and C′ further and individually is substituted with a ligand represented by the formula CH(X)R, wherein X is a N, P, or S-substituted functional group or hydroxyl, and Ris hydrogen or a hydrocarbon. Methods of production of the vapor deposition precursors and the resulting films, and uses and end uses of the vapor deposition precursors and resulting films are also described.
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