- Aurora IL, US Lin Fu - Rancho Palos Verdes CA, US Chen-Chih Tsai - Naperville IL, US Jaeseck Lee - Beaverton OR, US Sarah Brosnan - St. Charles IL, US
International Classification:
B24B 37/24
Abstract:
A chemical-mechanical polishing pad comprising a thermosetting polyurethane polishing layer includes an isocyanate-terminated urethane prepolymer, a polyamine curative, and a cyclohexanedimethanol curative. The polyamine curative and the cyclohexanedimethanol curative are in a molar ratio of polyamine curative to cyclohexanedimethanol curative in a range from about 20:1 to about 1:1.
Chemical Mechanical Planarization Pads Via Vat-Based Production
- Aurora IL, US Lin FU - Rancho Palos Verdes CA, US William Michael SPITZIG - Lake Oswego OR, US Chen-Chih TSAI - Naperville IL, US Ping HUANG - Beaverton OR, US Justin STEWART - Aurora IL, US Carlos BARROS - West Chicago IL, US
International Classification:
B24B 37/24 B24B 37/26 B24B 37/22
Abstract:
A chemical mechanical polishing (CMP) pad includes a polishing portion formed using a vat-based additive manufacturing process. The polishing portion includes a polymer material with a first elastic modulus. In some embodiments the polishing portion is disposed on the backing portion. The backing portion may have a second elastic modulus. The second elastic modulus may be less than the first elastic modulus.