Erik Reddington - Ashland MA, US Gonzalo Urrutia Desmaison - Berlin, DE Zukhra I. Niazimbetova - Westborough MA, US Donald E. Cleary - Littleton MA, US Mark Lefebvre - Hudson NH, US
Assignee:
Rohm and Haas Electronic Materials LLC - Marlborough MA
Disclosed are metal plating compositions for plating a metal on a substrate. The metal plating compositions include compounds which influence the leveling and throwing performance of the metal plating compositions. Also disclosed are methods of depositing metals on a substrate.
Zukhra I. Niazimbetova - Westboro MA, US Maria Anna Rzeznik - Shrewsbury MA, US
Assignee:
Rohm and Haas Electronic Materials LLC - Marlborough MA
International Classification:
C08F 2/10 C08G 59/14 C23C 18/38 C25D 3/38
US Classification:
205297, 106 126, 25218311, 427487, 528117
Abstract:
Copper plating baths containing a leveling agent that is a reaction product of a certain benzimidazole with a certain epoxide-containing compound that deposit copper on the surface of a conductive layer are provided. Such plating baths deposit a copper layer that is substantially planar on a substrate surface across a range of electrolyte concentrations. Methods of depositing copper layers using such copper plating baths are also disclosed.
Copper plating baths containing a leveling agent that is a reaction product of a certain imidazole with a certain epoxide-containing compound that deposit copper on the surface of a conductive layer are provided. Such plating baths deposit a copper layer that is substantially planar on a substrate surface across a range of electrolyte concentrations. Methods of depositing copper layers using such copper plating baths are also disclosed.
Zukhra I. Niazimbetova - Westboro MA, US Elie H. Najjar - Norwood MA, US Maria Anna Rzeznik - Shrewsbury MA, US Erik Reddington - Ashland MA, US
Assignee:
Rohm and Haas Electronic Materials LLC - Marlborough MA
International Classification:
C08G 59/14 C09K 3/00 C23C 18/38 C25D 3/38
US Classification:
205297, 106 126, 25218311, 528117
Abstract:
Copper plating baths containing a leveling agent that is a reaction product of a certain imidazole with a certain epoxide-containing compound that deposit copper on the surface of a conductive layer are provided. Such plating baths deposit a copper layer that is substantially planar on a substrate surface across a range of electrolyte concentrations. Methods of depositing copper layers using such copper plating baths are also disclosed.
Erik Reddington - Ashland MA, US Gonzalo Urrutia Desmaison - Berlin, DE Zukhra I. Niazimbetova - Westborough MA, US Donald E. Cleary - Littleton MA, US Mark Lefebvre - Hudson NH, US
Assignee:
Rohm and Haas Electronic Materials LLC - Marlborough MA
Zukhra I. Niazimbetova - Westboro MA, US Elie H. Najjar - Norwood MA, US Maria Anna Rzeznik - Shrewsbury MA, US Erik Reddington - Ashland MA, US
Assignee:
Rohm and Haas Electronic Materials LLC - Marlborough MA
International Classification:
C25D 3/38 C07D 233/58 C07D 233/64
US Classification:
205297, 5483351, 5483435, 5483411
Abstract:
Copper plating baths containing a leveling agent that is a reaction product of a certain imidazole with a certain epoxide-containing compound that deposit copper on the surface of a conductive layer are provided. Such plating baths deposit a copper layer that is substantially planar on a substrate surface across a range of electrolyte concentrations. Methods of depositing copper layers using such copper plating baths are also disclosed.
Erik REDDINGTON - Ashland MA, US Gonzalo Urrutia DESMAISON - Berlin, DE Zukhra I. NIAZIMBETOVA - Westborough MA, US Donald E. CLEARY - Littleton MA, US Mark LEFEBVRE - Hudson MA, US
Assignee:
Rohm and Haas Electronic Materials LLC - Marlborough MA
Erik Reddington - Ashland MA, US Gonzalo Urrutia Desmaison - Berlin, DE Zukhra I. Niazimbetova - Westborough MA, US Donald E. Cleary - Littleton MA, US Mark Lefebvre - Hudson NH, US
Assignee:
Rohm and Haas Electronic Materials LLC - Marlborough MA
International Classification:
H05K 3/00 B05D 5/12 B05D 1/36
US Classification:
427 961, 427404, 427123
Abstract:
Disclosed are metal plating compositions for plating a metal on a substrate. The metal plating compositions include compounds which influence the leveling and throwing performance of the metal plating compositions. Also disclosed are methods of depositing metals on a substrate.