Deva N. Pattanayak - Saratoga CA, US Yuming Bai - Union City CA, US Kyle Terrill - Santa Clara CA, US Christiana Yue - Milpitas CA, US Robert Xu - Fremont CA, US Kam Hong Lui - Santa Clara CA, US Kuo-In Chen - Los Altos CA, US Sharon Shi - San Jose CA, US
Assignee:
Siliconix Incorporated - Santa Clara CA
International Classification:
H01L 29/76
US Classification:
257333, 257E29027, 257E29262
Abstract:
In a trench MOSFET, the lower portion of the trench contains a buried source electrode, which is insulated from the epitaxial layer and semiconductor substrate but in electrical contact with the source region. When the MOSFET is in an “off” condition, the bias of the buried source electrode causes the “drift” region of the mesa to become depleted, enhancing the ability of the MOSFET to block current. The doping concentration of the drift region can therefore be increased, reducing the on-resistance of the MOSFET. The buried source electrode also reduces the gate-to-drain capacitance of the MOSFET, improving the ability of the MOSFET to operate at high frequencies. The substrate may advantageously include a plurality of annular trenches separated by annular mesas and a gate metal layer that extends outward from a central region in a plurality of gate metal legs separated by source metal regions.
Method Of Fabricating Super Trench Mosfet Including Buried Source Electrode
Deva N. Pattanayak - Saratoga CA, US Yuming Bai - Union City CA, US Kyle Terrill - Santa Clara CA, US Christiana Yue - Milpitas CA, US Robert Xu - Fremont CA, US Kam Hong Lui - Santa Clara CA, US Kuo-In Chen - Los Altos CA, US Sharon Shi - San Jose CA, US
In a trench MOSFET, the lower portion of the trench contains a buried source electrode, which is insulated from the epitaxial layer and semiconductor substrate but in electrical contact with the source region. When the MOSFET is in an “off” condition, the bias of the buried source electrode causes the “drift” region of the mesa to become depleted, enhancing the ability of the MOSFET to block current. The doping concentration of the drift region can therefore be increased, reducing the on-resistance of the MOSFET. The buried source electrode also reduces the gate-to-drain capacitance of the MOSFET, improving the ability of the MOSFET to operate at high frequencies. The substrate may advantageously include a plurality of annular trenches separated by annular mesas and a gate metal layer that extends outward from a central region in a plurality of gate metal legs separated by source metal regions.
Trench Metal Oxide Semiconductor With Recessed Trench Material And Remote Contacts
Deva N. Pattanayak - Saratoga CA, US Kyle Terrill - Santa Clara CA, US Sharon Shi - San Jose CA, US Misha Lee - San Jose CA, US Yuming Bai - Union City CA, US Kam Lui - Santa Clara CA, US Kuo-In Chen - Los Altos CA, US
Assignee:
Vishay-Siliconix - Santa Clara CA
International Classification:
H01L 29/80
US Classification:
257260, 257280, 257284, 257330, 257E29201
Abstract:
Remote contacts to the polysilicon regions of a trench metal oxide semiconductor (MOS) barrier Schottky (TMBS) device, as well as to the polysilicon regions of a MOS field effect transistor (MOSFET) section and of a TMBS section in a monolithically integrated TMBS and MOSFET (SKYFET) device, are employed. The polysilicon is recessed relative to adjacent mesas. Contact of the source metal to the polysilicon regions of the TMBS section is made through an extension of the polysilicon to outside the active region of the TMBS section. This change in the device architecture relieves the need to remove all of the oxides from both the polysilicon and silicon mesa regions of the TMBS section prior to the contact step. As a consequence, encroachment of contact metal into the sidewalls of the trenches in a TMBS device, or in a SKYFET device, is avoided.
Sharon Shi - San Jose CA, US Qufei Chen - San Jose CA, US Martin Hernandez - San Jose CA, US Deva Pattanayak - Saratoga CA, US Kyle Terrill - Santa Clara CA, US Kuo-In Chen - Los Altos CA, US
Assignee:
Vishay-Silconix - Santa Clara CA
International Classification:
H01L 21/336
US Classification:
438270, 257341, 257E29257, 257E2926
Abstract:
Ultra-low drain-source resistance power MOSFET. In accordance with an embodiment of the preset invention, a semiconductor device comprises a plurality of trench power MOSFETs. The plurality of trench power MOSFETs is formed in a second epitaxial layer. The second epitaxial layer is formed adjacent and contiguous to a first epitaxial layer. The first epitaxial layer is formed adjacent and contiguous to a substrate highly doped with red Phosphorous. The novel red Phosphorous doped substrate enables a desirable low drain-source resistance.
Super Trench Mosfet Including Buried Source Electrode And Method Of Fabricating The Same
Deva Pattanayak - Saratoga CA, US Yuming Bai - Union City CA, US Kyle Terrill - Santa Clara CA, US Christiana Yue - Milpitas CA, US Robert Xu - Fremont CA, US Kam Lui - Santa Clara CA, US Kuo-In Chen - Los Altos CA, US Sharon Shi - San Jose CA, US
Assignee:
Siliconix incorporated - Santa Clara CA
International Classification:
H01L029/94 H01L021/8238
US Classification:
257328000, 438212000, 257330000, 438589000
Abstract:
In a trench MOSFET, the lower portion of the trench contains a buried source electrode, which is insulated from the epitaxial layer and semiconductor substrate but in electrical contact with the source region. When the MOSFET is in an “off” condition, the bias of the buried source electrode causes the “drift” region of the mesa to become depleted, enhancing the ability of the MOSFET to block current. The doping concentration of the drift region can therefore be increased, reducing the on-resistance of the MOSFET. The buried source electrode also reduces the gate-to-drain capacitance of the MOSFET, improving the ability of the MOSFET to operate at high frequencies. The substrate may advantageously include a plurality of annular trenches separated by annular mesas and a gate metal layer that extends outward from a central region in a plurality of gate metal legs separated by source metal regions.
Sharon Shi - San Jose CA, US Qufei Chen - San Jose CA, US Martin Hernandez - San Jose CA, US Deva Pattanayak - Saratoga CA, US Kyle Terrill - Santa Clara CA, US Kuo-In Chen - Los Altos CA, US
International Classification:
H01L 29/36
US Classification:
257607, 257E29109, 257E29024
Abstract:
Ultra-low drain-source resistance power MOSFET. In accordance with an embodiment of the preset invention, a semiconductor device comprises a plurality of trench power MOSFETs. The plurality of trench power MOSFETs is formed in a second epitaxial layer. The second epitaxial layer is formed adjacent and contiguous to a first epitaxial layer. The first epitaxial layer is formed adjacent and contiguous to a substrate highly doped with red Phosphorus. The novel red Phosphorus doped substrate enables a desirable low drain-source resistance.
Mosfet Active Area And Edge Termination Area Charge Balance
A method for fabricating a MOSFET having an active area and an edge termination area is disclosed. The method includes forming a first plurality of implants at the bottom of trenches located in the active area and in the edge termination area. A second plurality of implants is formed at the bottom of the trenches located in the active area. The second plurality of implants formed at the bottom of the trenches located in the active area causes the implants formed at the bottom of the trenches located in the active area to reach a predetermined concentration. In so doing, the breakdown voltage of both the active and edge termination areas can be made similar and thereby optimized while maintaining advantageous RDson.
Method Of Fabricating Super Trench Mosfet Including Buried Source Electrode
Deva N. Pattanayak - Saratoga CA, US Yuming Bai - Union City CA, US Kyle Terrill - Santa Clara CA, US Christiana Yue - Milpitas CA, US Robert Xu - Fremont CA, US Kam Hong Lui - Santa Clara CA, US Kuo-In Chen - Los Altos CA, US Sharon Shi - San Jose CA, US
Assignee:
Siliconix incorporated - Santa Clara CA
International Classification:
H01L 29/78
US Classification:
257330, 257E29262
Abstract:
A method of fabricating a trench MOSFET, the lower portion of the trench containing a buried source electrode which is insulated from the epitaxial layer and semiconductor substrate but in electrical contact with the source region. When the MOSFET is in an “off” condition, the bias of the buried source electrode causes the “drift” region of the mesa to become depleted, enhancing the ability of the MOSFET to block current. The doping concentration of the drift region can therefore be increased, reducing the on-resistance of the MOSFET. The buried source electrode also reduces the gate-to-drain capacitance of the MOSFET, improving the ability of the MOSFET to operate at high frequencies. The substrate may advantageously include a plurality of annular trenches separated by annular mesas and a gate metal layer that extends outward from a central region in a plurality of gate metal legs separated by source metal regions.
Name / Title
Company / Classification
Phones & Addresses
Sharon Shi Executive Director
21ST Century Institute Business Associations
1000 Jorie Blvd STE 21, Oak Brook, IL 60523 630 574-2175, 630 574-2121
Adf Jul 2010 - Feb 2011
Eb5 Attorney
Law Offices of Sharon Shi Jul 2010 - Feb 2011
Managing Attorney
Legal Immigrant Association Mar 2008 - Dec 2010
Board Member and Immigration Counselor
Choi & Wagreich Jan 2008 - Feb 2010
Associate Attorney
Education:
Chicago - Kent College of Law, Illinois Institute of Technology 2003 - 2004
East China University of Political Science and Law 2001 - 2004
Masters, Law
Chicago - Kent College of Law
Chicago - Kent College of Law, Illinois Institute of Technology
Doctor of Jurisprudence, Doctorates
Skills:
Immigration Issues Management Consulting Management Marketing Mandarin Public Speaking Immigration Law Entrepreneurship Adjustment of Status Joint Ventures Business Development Legal Writing International Business Research Foreign Investment Marketing Strategy Commercial Litigation Corporate Finance Corporate Governance Legal Advice Appeals International Relations Legal Assistance Mediation Intellectual Property Legal Issues Valuation Labor Certification Arbitration Financial Analysis Courts Civil Litigation Employment Law Licensing E 2 Chinese Market Research English International Trade Administrative Law Social Media Financial Modeling Bankruptcy Time Management L 1 Portfolio Management Analysis Emerging Markets Event Management Market Analysis
Baird & Warner Jun 2001 - Nov 2004
Accounting Manager
Diamond Envelope Jun 2001 - Nov 2004
Senior Accountant and Operations Manager
Monett Metals Aug 1996 - Jun 2001
Controller
Southern Illinois University May 1993 - Aug 1996
Research Assistant
Education:
Southern Illinois University, Carbondale 1993 - 1996
Masters, Accountancy
Peking University
Masters, Master of Arts
Peking University
Bachelors, Bachelor of Arts
Managing Director at Law Offices of Sharon Shi, Immigration Attorney at Law Offices of Sharon Shi, Board Member at InternshipDesk
Location:
Greater Chicago Area
Industry:
Law Practice
Work:
Law Offices of Sharon Shi since Jun 2011
Managing Director
Law Offices of Sharon Shi since Jan 2011
Immigration Attorney
InternshipDesk - Chicago, IL since Jan 2011
Board Member
Education:
Chicago-Kent College of Law, Illinois Institute of Technology 2003 - 2004
Master of Law, International Intellectual Property Law
East China University of Politics and Law 2001 - 2004
Master of Law, Criminal Law
Skills:
Immigration Law Entrepreneurship Mandarin Management Consulting Business Development Immigration Issues
Interests:
Karaoke, traveling, food
Honor & Awards:
BEST OWNER - RATED BY MY DOG.
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PLEASE VOTE FOR LIA
1. Immigration Daily (www.ilw.com) Gave Credit to LIA for 485 Inventory Data disclosure:http://www.ilw.com/immigdaily/digest/2009,0928.shtm#comment
2. From April to early September 2008, LIA members visited offices of 30 legislators nationwide, and submitted LIA’s petitions for legal immigration reform. Emphasis was on members of the Sub-committee on Immigration and the Judiciary Committee of the House of Representatives.
Following these visits, Congressmen Michael Honda, Sheila Jackson-Lee and Mel Watt became co-sponsors of Congresswoman Lofgren’s Visa Recapture bill (H.R. 5882). Congressman David Wu will co-sponsor both the Visa Recapture bill and STEM bill (H.R. 6039) of Congresswoman Lofgren.
3. Initiated lobbying to introduce a bill which was later introduced by Senator Gillibrand to increase Chinese employment visa quota (Accept Chinese Talent Now Act of 2009 - S.1182).