Brian David Elolampi - Belmont MA, US Roozbeh Ghaffari - Cambridge MA, US Bassel de Graff - San Juan, TT William Arora - Bellevue WA, US Xiaolong Hu - Cambridge MA, US
International Classification:
H01L 23/13
US Classification:
257618
Abstract:
Flexible electronic structure and methods for fabricating flexible electronic structures are provided. An example method includes applying a first layer to a substrate, creating a plurality of vias through the first layer to the substrate, and applying a second polymer layer to the first layer such that the second polymer forms anchors contacting at least a portion of the substrate. At least one electronic device layer is disposed on a portion of the second polymer layer. At least one trench is formed through the second polymer layer to expose at least a portion of the first layer. At least a portion of the first layer is removed by exposing the structure to a selective etchant to providing a flexible electronic structure that is in contact with the substrate. The electronic structure can be released from the substrate.
Optical Detectors And Associated Systems And Methods
Francesco Bellei - Cambridge MA, US Karl K. Berggren - Arlington MA, US Eric Dauler - Charlestown MA, US Xiaolong Hu - New York NY, US Francesco Marsili - Boulder CO, US Faraz Najafi - Cambridge MA, US
Assignee:
Massachusetts Institute of Technology - Cambridge MA
International Classification:
G01J 1/42 G01J 1/04 G01J 5/08 G01J 5/10
US Classification:
505160, 250200, 2503381, 250216, 250353, 977954
Abstract:
Optical detectors and associated systems and methods are generally described. In certain embodiments, the optical detectors comprise nanowire-based single-photon detectors, including those with advantageous geometric configurations.
Systems, articles, and methods are provided related to nanowire-based detectors, which can be used for light detection in, for example, single-photon detectors. In one aspect, a variety of detectors are provided, for example one including an electrically superconductive nanowire or nanowires constructed and arranged to interact with photons to produce a detectable signal. In another aspect, fabrication methods are provided, including techniques to precisely reproduce patterns in subsequently formed layers of material using a relatively small number of fabrication steps. By precisely reproducing patterns in multiple material layers, one can form electrically insulating materials and electrically conductive materials in shapes such that incoming photons are redirected toward a nearby electrically superconductive materials (e.g., electrically superconductive nanowire(s)). For example, one or more resonance structures (e.g., comprising an electrically insulating material), which can trap electromagnetic radiation within its boundaries, can be positioned proximate the nanowire(s). The resonance structure can include, at its boundaries, electrically conductive material positioned proximate the electrically superconductive nanowire such that light that would otherwise be transmitted through the sensor is redirected toward the nanowire(s) and detected. In addition, electrically conductive material can be positioned proximate the electrically superconductive nanowire (e.g. at the aperture of the resonant structure), such that light is directed by scattering from this structure into the nanowire.
Method For Fabricating A Flexible Electronic Structure And A Flexible Electronic Structure
- Lexington MA, US Roozbeh Ghaffari - Cambridge MA, US Bassel de Graff - San Juan, TT William J. Aurora - Bellevue WA, US Xiaolong Hu - Cambridge MA, US
International Classification:
H05K 1/02 H05K 1/03 H05K 1/11 H05K 3/46 H05K 3/06
Abstract:
Flexible electronic structure and methods for fabricating flexible electronic structures are provided. An example method includes applying a first layer to a substrate, creating a plurality of vias through the first layer to the substrate, and applying a second polymer layer to the first layer such that the second polymer forms anchors contacting at least a portion of the substrate. At least one electronic device layer is disposed on a portion of the second polymer layer. At least one trench is formed through the second polymer layer to expose at least a portion of the first layer. At least a portion of the first layer is removed by exposing the structure to a selective etchant to providing a flexible electronic structure that is in contact with the substrate. The electronic structure can be released from the substrate.
Compactly-Integrated Optical Detectors And Associated Systems And Methods
The Trustees of Columbia University in the City of New York - , US Massachusetts Institute of Technology - , US Faraz Najafi - Cambridge MA, US Xiaolong Hu - New York NY, US Karl K. Berggren - Arlington MA, US
Assignee:
Massachusetts Institute of Technology - Cambridge MA The Trustees of Columbia University in the City of New York - New York NY
International Classification:
H01L 31/0352 H01L 31/032
US Classification:
505181, 505330, 257 21, 438 2
Abstract:
Compactly-integrated electronic structures and associated systems and methods are provided. Certain embodiments relate to the ability to integrate nanowire-based detectors with optical components.