Simon Shmookler - San Francisco CA Andrew G. Weinberg - San Jose CA Martin J. McGrath - Sunnyvale CA
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
G05B 1101
US Classification:
31856816
Abstract:
An improved position control means for robotic handling systems; particularly, a system and method for determining the centerpoint of a moving object, such as a semiconductor wafer, and calibration of the object support, using an array of sensors positioned generally transverse to the arcuate path of movement of the object and its support to detect the relative positions of the object and the support to a selected destination point for the purpose of precisely positioning the object relative to the selected destination point.
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