Sandy M.-S. Chew - Fremont CA Shane D. Clark - Livermore CA Ron L. Rose - Los Gatos CA Dale R. DuBois - Los Gatos CA Cissy Leung - Fremont CA Alan F. Morrison - San Jose CA Manus K. Wong - San Jose CA
Applied Materials, Inc. - Santa Clara CA
A substrate lifting apparatus for use in a substrate processing apparatus which includes a thermal reactor having a substrate processing chamber and a substrate support located in the chamber. The lifting apparatus consists of a generally circular shaped support with four seats formed therein; four substrate lifting elements, each having a substrate engaging end and a securing tab sized to be received in a seat; a fastener, associated with each lifting element, which secures the tab into the seat; and an adjuster, associated with each lifting element, located between the tab and the seat. When the tab is secured in the seat and the adjuster is operated, the lifting element is caused to move in a plane parallel to a plane formed through the center of the fastener and the adjuster.
Were launching with the Centaur geosynchronous orbit kit, said Col. Shane Clark, AEHF 5 mission director from the Launch Enterprise Systems Directorate at the Air Forces Space and Missile Systems Center. The GSO kit enables an orbital insertion much closer to the final orbit than a traditional