Sarah J White

US Patent:

20200041407, Feb 6, 2020

Filed:

Jul 2, 2019

Appl. No.:

16/460309

Inventors:

- Santa Clara CA, US
Sarah Langlois WHITE - Sunnyvale CA, US
Jonathan Robert BAKKE - Sunnyvale CA, US
Diwakar N. KEDLAYA - San Jose CA, US
Juan Carlos ROCHA - San Carlos CA, US
Fang RUAN - Milpitas CA, US

International Classification:

G01N 21/3504
G01N 21/33
H01L 21/02
H01L 21/67
C23C 16/448
C23C 16/52

Abstract:

Systems and methods used to deliver a processing gas having a desired diborane concentration to a processing volume of a processing chamber are provided herein. In one embodiment a system includes a borane concentration sensor. The borane concentration sensor includes a body and a plurality of windows. Here, individual ones of the plurality of windows are disposed at opposite ends of the body and the body and the plurality of windows collectively define a cell volume. The borane concentration sensor further includes a radiation source disposed outside of the cell volume proximate to a first window of the plurality of windows, and a radiation detector disposed outside the cell volume proximate to a second window of the plurality of windows.