Salam M Harb

US Patent:

7800735, Sep 21, 2010

Filed:

May 30, 2006

Appl. No.:

11/420985

Inventors:

Salam Harb - Los Gatos CA, US
Kent Douglas - San Martin CA, US
James Haslim - Dublin CA, US
Jon Hamilton - Alameda CA, US

Assignee:

KLA-Tencor Technologies Corporation - Milpitas CA

International Classification:

G03B 27/58

US Classification:

355 72

Abstract:

Substrate support apparatus and methods are described. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion. The cantilever portion may include a parallelogram flexure coupled between the base portion and a free end of the cantilever portion.

US Patent:

7919193, Apr 5, 2011

Filed:

Oct 24, 2007

Appl. No.:

11/877713

Inventors:

Mohammed Tahmassebpur - San Ramon CA, US
Salam Harb - Los Gatos CA, US
Liqun Han - Pleasanton CA, US
Marian Mankos - Palo Alto CA, US

Assignee:

KLA-Tencor Corporation - Milpitas CA

International Classification:

B32B 15/04
B32B 15/18

US Classification:

428634, 428678, 428679, 428680, 428681

Abstract:

A component for use in a high vacuum environment, the component including a core of non-magnetic Hastelloy with a cladding of nickel-iron covering the core at least in part. The component can be, for example, at least one of a gate valve for use in a high vacuum environment of an electron gun, a bearing, a slide way, a gate valve bearing, a rotary slide, a linear slide, an electron beam column, and electron beam chamber, and a vacuum chamber. In this manner, because the final mechanical tolerance is controlled by machining instead of part assembling, extremely high alignment accuracy is obtained. The final part provides field shielding as provided by the nickel alloy shell, low stray field provided by the non-magnetic Hastelloy, good vacuum performance, and tight mechanical tolerance control. Also, because Hastelloy has the advantage of a low oxidation rate in comparison to stainless steel and titanium, there is less contamination buildup due to conditions such as electron beam bombardment.

US Patent:

8092927, Jan 10, 2012

Filed:

Feb 25, 2011

Appl. No.:

13/034770

Inventors:

Mohammed Tahmassebpur - San Ramon CA, US
Salam Harb - Los Gatos CA, US
Liqun Han - Pleasanton CA, US
Marian Mankos - Palo Alto CA, US

Assignee:

KLA-Tencor Corporation - Milpitas CA

International Classification:

B32B 15/04
B32B 15/18
F16C 29/00
F16C 29/02

US Classification:

428698, 428101, 428472, 428408, 428697, 118720, 118721, 384 26

Abstract:

A method of forming a gate valve for use in a high vacuum environment of an electron gun by machining a core of non-magnetic nickel-chromium-molybdenum-iron-tungsten-silicon-carbon alloy that is weldable with nickel alloys and has a tensile strength of about 750 megapascals, machining a cladding of nickel-iron, welding the core to the cladding to form the gate valve, and machining the gate valve so as to remove any dimensional differences at an interface between the core and the cladding. In this manner, because the final mechanical tolerance is controlled by machining instead of part assembling, extremely high alignment accuracy is obtained. The final part provides field shielding as provided by the nickel alloy shell, low stray field provided by the non-magnetic alloy, good vacuum performance, and tight mechanical tolerance control. Also, because the alloy has the advantage of a low oxidation rate in comparison to stainless steel and titanium, there is less contamination buildup due to conditions such as electron beam bombardment.

US Patent:

8169768, May 1, 2012

Filed:

May 21, 2009

Appl. No.:

12/470169

Inventors:

Mohammed Tahmassebpur - San Ramon CA, US
Salam Harb - Los Gatos CA, US

Assignee:

KLA-Tencor Corporation - Milpitas CA

International Classification:

H01T 23/00

US Classification:

361234, 361233, 118728, 15634551

Abstract:

An electrostatic chuck for retaining a substrate. The chuck has a clamping surface for receiving the substrate, where the clamping surface is formed of a hard polymeric material filled with carbon nanotubes. Electrodes are disposed beneath the clamping surface, for inducing localized electrostatic charges in the substrate and thereby retaining the substrate against the clamping surface. A base supports the clamping surface and the electrodes.

US Patent:

8390789, Mar 5, 2013

Filed:

Aug 3, 2010

Appl. No.:

12/849718

Inventors:

Salam Harb - Los Gatos CA, US
Kent Douglas - San Martin CA, US
James Haslim - Dublin CA, US
Jon Hamilton - Alameda CA, US

Assignee:

KLA-Tencor Technologies Corporation - Milpitas CA

International Classification:

G03B 27/58

US Classification:

355 72

Abstract:

Substrate support apparatus and methods are disclosed. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion. The cantilever portion may include a parallelogram flexure coupled between the base portion and a free end of the cantilever portion.

US Patent:

20130176548, Jul 11, 2013

Filed:

Mar 4, 2013

Appl. No.:

13/784402

Inventors:

Salam Harb - Los Gatos CA, US
Kent Douglas - San Martin CA, US
Marek Zywno - San Jose CA, US
James Haslim - Dublin CA, US
Jon Hamilton - Alameda CA, US

Assignee:

KLA-Tencor Corporation - Milpitas CA

International Classification:

G03F 7/20

US Classification:

355 72, 74470

Abstract:

Substrate support apparatus and methods are disclosed. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion. The cantilever portion may include a parallelogram flexure coupled between the base portion and a free end of the cantilever portion.

US Patent:

20140072452, Mar 13, 2014

Filed:

Sep 10, 2013

Appl. No.:

14/023169

Inventors:

Salam Harb - Los Gatos CA, US

International Classification:

F04D 19/04

US Classification:

417 51, 417 48

Abstract:

An apparatus for shielding a controlled pressure environment, including a shield assembly with: a gate disc arranged for location in a chamber and including a first continuous surface facing an opening in the chamber and including an outer circumference extending past the opening in a radial direction orthogonal to a longitudinal axis passing through the chamber and the opening; and an at least one actuator arranged to displace the gate disc in an axial direction parallel to the longitudinal axis. The opening is arranged for connection to an inlet of a vacuum pump. In an example embodiment, the thermal system attains and maintains thermal equilibrium in the chamber and/or to shields the chamber from unwanted thermal affects by heating or cooling the gate disc to offset cooling or heat generated by the vacuum pump. For example, the gate disc is cooled to offset heat generated by a turbo-molecular pump.

US Patent:

7566873, Jul 28, 2009

Filed:

Dec 14, 2006

Appl. No.:

11/638805

Inventors:

David Walker - Livermore CA, US
Salam Harb - Los Gatos CA, US
Vassil Spasov - San Jose CA, US
David Stites - St. Petersburg FL, US
Izzy Lewis - San Jose CA, US
Marian Mankos - Palo Alto CA, US

Assignee:

KLA-Tencor Technologies Corporation - Milpitas CA

International Classification:

G01N 23/00
G21K 7/00

US Classification:

250310, 250306, 250307, 250311, 2504921, 250396 R, 2503362, 2503581, 2503601, 850 9, 850 11

Abstract:

One embodiment relates to an apparatus for inspecting a substrate using charged particles. The apparatus includes an illumination subsystem, an objective subsystem, a projection subsystem, and a beam separator interconnecting those subsystems. The apparatus further includes a detection system which includes a scintillating screen, a detector array, and an optical coupling apparatus positioned therebetween. The optical coupling apparatus includes both refractive and reflective elements. Other embodiments and features are also disclosed.