A wafer processing system is described located in at least one clean room and having an arrangement of manufacturing units for performing individual manufacturing operations. In a manufacturing unit, measuring devices are provided for determining process parameters in order to check the quality of wafer processing of the manufacturing operations. Process data generated by the measuring devices is compiled continuously in a computing unit assigned to the manufacturing unit. Characteristic quantities for evaluating the quality of wafer processing are derived from this process data.
Cooling System For Diesel Emissions Fluid Injector
Viresh B. Shah - Aurora IL, US Paul Gerald Savich - Joliet IL, US Ronald J. Huber - Elburn IL, US Vivek Sundararaj - Peoria IL, US
Assignee:
CATERPILLAR, INC. - Peoria IL
International Classification:
F01N 3/10 H01L 23/467
US Classification:
60287, 165121
Abstract:
A diesel emission fluid (DEF) injection system for a machine is disclosed. The machine includes a fan or a source of flowing air, as well as a first portion of an exhaust system coupled to an exhaust after-treatment device and a second portion of the exhaust system disposed below the exhaust after-treatment device. The DEF injection system includes a DEF line in selective communication with the first portion of the exhaust system as well as electrical components such as an electrically activated valve for injecting the DEF into the first portion of the exhaust system. To maintain the electrical components at acceptably low temperatures, a heat shield is disposed between the electrical components and the second portion of the exhaust system and an air duct is provided that communicates air from the fan or source of flowing air towards the electrical components for forced air cooling.
Hillside Elementary School Ft. Lewis WA 1972-1973, Booth Tarkington Elementary School 92 Indianapolis IN 1974-1974, Mary Evelyn Castle Elementary School Indianapolis IN 1975-1975, Andy Anderson Elementary School Houston TX 1976-1976, Miller Intermediate School Pasadena TX 1977-1979
Community:
Dickie Cloutman, Richard Harris, Petrea Boyer, Jan Wagley