Hazard Clinic 271 E Main St STE 101, Hazard, KY 41701 606 439-1316 (phone), 606 436-2667 (fax)
Education:
Medical School University of Louisville School of Medicine Graduated: 1965
Languages:
English
Description:
Dr. Collier graduated from the University of Louisville School of Medicine in 1965. He works in Hazard, KY and specializes in Pediatrics and Adolescent Medicine. Dr. Collier is affiliated with Hazard Appalachian Regional Medical Center.
PO Box 1257, Oklahoma City, OK 73101 620 St N Robnson 20, Oklahoma City, OK 73102 PO Box 711, Kingfisher, OK 73750 620 N Robinson Ave STE 202, Oklahoma City, OK 73102 405 236-1204, 405 232-7636
Ronald E. Collier - Lakeville MN, US Andrey Zagrebelny - Eagan MN, US
Assignee:
Cypress Semiconductor Corp. - San Jose CA
International Classification:
B24B 1/00
US Classification:
452 56, 451 41
Abstract:
A method and a system are provided for removing matter adhered to such a polishing pad. In particular, a polishing system is provided which is adapted to remove matter adhered to a polishing pad during a polishing process of a semiconductor topography. The polishing system may include a polishing pad and a spray element, which is preferably adapted to spray a pressurized fluid upon the polishing pad to remove matter adhered to the pad. In addition, a spray element is provided which may be adapted to be positioned within a polishing system. Such a spray element may be adapted to remove matter adhered to a polishing pad within the system by spraying a pressurized fluid upon the polishing pad. In addition, methods for cleaning a polishing pad during a polishing process and polishing multiple semiconductor topographies using the systems described herein are provided.