Roger S Posusta

US Patent:

20020088922, Jul 11, 2002

Filed:

Jan 10, 2001

Appl. No.:

09/757784

Inventors:

Roger Schmitz - Hutchinson MN, US
Senthil Balasubramaniam - Chaska MN, US
Roger Posusta - Silver Lake MN, US

International Classification:

G01C021/02

US Classification:

250/206100

Abstract:

A measurement device includes a laser or other light source for producing a light beam, and optics that split the light beam into a plurality of differentiable beam portions, such as a plurality of polarized beams. The optics also direct the differentiable beam portions toward a target to be measured. The measurement device also includes a detection component, such as a plurality of position sensitive detectors, positioned to intercept images created by simultaneous incidence of the differentiable beam portions on the target. The data collected by the detection component is used to calculate measurement data related to the target. When used with a head suspension target, displacement of various regions of the head suspension may be measured relative to a reference region, such as the mounting region of the head suspension.