Roger W Eagans from 11439 W Blackmoor St, Boise, ID 83709, age 55, Phone: 208 284-0499

Roger Eagans Phones & Addresses

Multi-Parameter Process And Control Method
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US Patent:

20040173599, Sep 9, 2004
Filed:

Mar 4, 2003
Appl. No.:

10/378757
Inventors:

Sergey Velichko - Boise ID, US
Jeffrey Nelson - Boise ID, US
Roger Eagans - Nampa ID, US
International Classification:

H05B001/02
US Classification:

219/494000
Abstract:

A method and system for generating control settings for a multi-parameter control system. The interdependencies of processing tools and the related effect on semiconductor wafers within a processing tool is factored into a mathematical model that considers desired and measured wafer quality parameters in the derivation of specific solutions of sets of possible quality parameter adjustments. A selection process determines a set of adjustments such as one that results in minimal changes to the process.

Multi-Parameter Process And Control Method
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US Patent:

20060027566, Feb 9, 2006
Filed:

Sep 29, 2005
Appl. No.:

11/239747
Inventors:

Sergey Velichko - Boise ID, US
Jeffrey Nelson - Boise ID, US
Roger Eagans - Nampa ID, US
International Classification:

H05B 1/02
US Classification:

219494000
Abstract:

A method and system for generating control settings for a multi-parameter control system. The interdependencies of processing tools and the related effect on semiconductor wafers within a processing tool is factored into a mathematical model that considers desired and measured wafer quality parameters in the derivation of specific solutions of sets of possible quality parameter adjustments. A selection process determines a set of adjustments such as one that results in minimal changes to the process.