Robert J Parks

US Patent:

6459490, Oct 1, 2002

Filed:

May 26, 2000

Appl. No.:

09/580473

Inventors:

William P. Kuhn - Tucson AZ
Robert E. Parks - Tucson AZ

Assignee:

Optical Perspectives Group, L.L.C. - Tucson AZ

International Classification:

G01B 902

US Classification:

356520, 359370

Abstract:

A dual field of view optical system and a single, lower cost detector are utilized, rather than using a large CCD camera or multiple CCD cameras, to view a sample that has two or more small areas that need to be measured, which are too far apart to fall on the detector but are within the field of view of the objective, or to measure a long, narrow strip that is too long for the detector, but whose total area is less than the detector area. The dual field of view optical system is employed in a microscope which comprises: (1) an illuminator arm with an illumination source and a field stop, (2) a beam splitter, (3) an objective, (4) a sample plane for location of a sample to be observed, and (5) a detector arm, with the illuminator arm configured to illuminate the sample plane through the beam splitter and the objective and with the detector arm configured to receive an image of the sample and including the dual field of view optical system. The dual field of view optical system comprises two beam splitters, two mirrors and one detector, the two beam splitters in the same plane and the mirrors disposed on either side of the beam splitters, an entrance portion for receiving the image from the sample and an exit portion for directing the image onto the detector.

US Patent:

6870615, Mar 22, 2005

Filed:

Mar 17, 2003

Appl. No.:

10/390817

Inventors:

Robert E. Parks - Tucson AZ, US
William P. Kuhn - Tucson AZ, US
Bryan Loucks - Los Altos Hills CA, US
Michael R. Jacobson - Tucson AZ, US

International Classification:

G01J003/42

US Classification:

356319, 356325

Abstract:

A modular dual-beam source, sample compartment and beam-combining system are provided when used with a monochromator and detector to form a spectrophotometer consisting of: (a) a source module where two ellipsoidal mirrors each produce an image of the light source, and (b) a reflecting sample-compartment module, wherein each side has two plane-mirrors, of the four plane mirrors, three are reference and one is the sample, or (c) a transmission sample-compartment module, wherein each side has two plane-mirrors, and a sample is placed between one pair of plane-mirrors, and (d) a beam-combining module wherein the source images are imaged by a second pair of ellipsoidal mirrors on a reflective chopper that combines the images at a single location that is imaged, external to the module, by another mirror, each module being kinematically located with respect to each other so the system remains optically aligned as modules are interchanged.

US Patent:

6924897, Aug 2, 2005

Filed:

Oct 9, 2001

Appl. No.:

09/975389

Inventors:

Robert E. Parks - Tucson AZ, US
William P. Kuhn - Tucson AZ, US

International Classification:

G01B009/02

US Classification:

356512, 356508

Abstract:

A point source module is provided, comprising: a Shack cube comprising a beam splitter cube with an attached spherical reference surface defining a reference arm; a test arm that is associated with transmission of optical radiation from a source to a sample; a point source of optical radiation whose emissions traverse both the reference arm and the test arm; and a detector associated with a surface of the beam splitter cube and receiving optical radiation from both the reference arm and the test arm and comprising a detector arm, an objective lens associated with the test arm, or both. Further, a method of aligning the point source module is provided, along with a method of using the point source microscope is provided. The apparatus and methods provide a compact, robust device and technique for measuring or locating optical or mechanical datum of parts that are being manufactured or assembled.

US Patent:

20060268282, Nov 30, 2006

Filed:

May 23, 2006

Appl. No.:

11/438885

Inventors:

Christopher Evans - Higganum CT, US
Christoph Kuechel - Jena, DE
Robert Parks - Tucson AZ, US
William Kuhn - Tucson AZ, US

International Classification:

G01B 11/02

US Classification:

356515000

Abstract:

A Fizeau interferometer is provided with an adaptive null optic whose shape may be selectively varied in a controllable way by the selective application of external mechanical loads to enable the interferometer to be dynamically adapted to testing a variety of aspherical segments of differing shapes without the need for providing individual reference surfaces to match the various shapes of each test segment.

US Patent:

20120293808, Nov 22, 2012

Filed:

Jan 18, 2012

Appl. No.:

13/353110

Inventors:

Robert E. Parks - Tucson AZ, US
Robert A. Smythe - Middletown CT, US
Peng Su - Tucson AZ, US
James H. Burge - Tucson AZ, US
Roger Angel - Tucson AZ, US

Assignee:

Arizona Board of Regents on behalf of the University of Arizona - Tucson AZ

International Classification:

G01B 11/24
G01N 21/88

US Classification:

356610, 3562372

Abstract:

A non-contact metrology system utilizes a display that can be programmed with a plurality of targets. The display targets shine on a specular surface and the reflected targets are detected by an imaging device. Based on the display pattern and the expected location of the reflected pattern, it is possible to characterize the reflective surface. The displayed pattern can be a regular array of targets and the reflected pattern detected by the imaging device is an irregular display of targets whose locations are based on the particular display pattern, the location of the display system and imaging device and the nature of the surface. Deviations of the actual location of targets from the expected location of targets is indicative of unexpected variations in the surface. Alternatively, the display has an irregular pattern of targets such that the reflected signals result in a regularly spaced array detected by the imaging device.

US Patent:

20130301056, Nov 14, 2013

Filed:

May 7, 2013

Appl. No.:

13/888787

Inventors:

Robert E. Parks - Tucson AZ, US

International Classification:

G01B 9/02

US Classification:

356486, 356489

Abstract:

An interferometric sensor having an interference objective, an illumination system, and a detection system configured to simultaneous non-contact determination of profile and roughness of a tested surface. The illumination system comprises a radiation source configured to emit three wavelengths of quasi-monochromatic light. The sensor further includes a detection system having a color array detector in optical communication with the interference objective and configured to detect the light reflected by the measurand. The sensitivity of measurement can be adjusted by re-orienting of a portion of the sensor with respect to the measurand.

US Patent:

59556617, Sep 21, 1999

Filed:

Jan 6, 1997

Appl. No.:

8/779087

Inventors:

Amin Samsavar - San Jose CA
Michael Weber - Sunnyvale CA
Thomas McWaid - Fremont CA
William P. Kuhn - Tucson AZ
Robert E. Parks - Tucson AZ

Assignee:

KLA-Tencor Corporation - San Jose CA

International Classification:

G01B 528

US Classification:

73105

Abstract:

An optical profilometer and a stylus probe measuring device used in the same instrument have the advantage that these two sensors can be quickly switched between each other. This can be an advantage when used to measure samples, since the optical profilometer can be used until a sample is found to be outside of the desired tolerances. Afterwards, the stylus probe measuring device can be used to accurately determine the profile data. This is an advantage because an optical profilometer is relatively quick, and the stylus probe measuring device is relatively accurate. Additionally, since the optical profilometer and stylus probe device are in the same instrument, the X and Y positions of these devices can be interrelated accurately. This allows images to be produced where the positions on the images can be easily correlated. For example, measurement cursors in sensor data displays can correlated by the positional offset information.

US Patent:

58974245, Apr 27, 1999

Filed:

Jul 10, 1995

Appl. No.:

8/500404

Inventors:

Christopher James Evans - Gaithersburg MD
Robert Edson Parks - Tucson AZ

Assignee:

The United States of America as represented by the Secretary of Commerce - Washington DC

International Classification:

B24B 1100

US Classification:

451 41

Abstract:

A polishing lap which is resistant to attack from corrosive and reactive ishing media and which has a surface which is sufficiently resilient to provide good finishes without hindering dimensional controlling and accuracy of the texturing comprises: a lap substrate wherein the surface of the lap substrate has an overall shape and a localized texture; and a replaceable lap film applied to the lap substrate surface and which is deformed to correspond to the localized texture of the lap substrate surface. The polishing lap can be easily reconditioned if contaminated or easily modified for use with different abrasives and polishing media.

Author:

Robert J. Parks

ISBN #:

0405099185

Author:

Robert J. Parks

ISBN #:

0804690278

Author:

Robert Parks

ISBN #:

0130614416

Author:

Robert Parks

ISBN #:

0130614904

Author:

Robert Parks

ISBN #:

0595365639

Author:

Robert Parks

ISBN #:

0875859054

Author:

Robert Parks

ISBN #:

0875981135

Author:

Robert Parks

ISBN #:

0875981267