Robert B Jacques

US Patent:

6485380, Nov 26, 2002

Filed:

Jan 12, 2001

Appl. No.:

09/759855

Inventors:

Ronald Spangler - Somerville MA
David Gilbert - Arlington MA
Carl Prestia - Stow MA
Emanuele Bianchini - Winchester MA
Kenneth B. Lazarus - Concord MA
Jeffrey W. Moore - Arlington MA
Robert N. Jacques - Andover MA
Jonathan C. Allen - Brookline MA
Farla M. Russo - Brookline MA

Assignee:

Active Control eXperts, Inc. - Cambridge MA

International Classification:

A63B 4902

US Classification:

473521, 473546, 310317, 310326

Abstract:

A golf club includes an electroactive assembly attached to the club and electrically tuned to capture energy from one or more vibrational modes with high efficiency. More generally, a sports implement includes an electroactive element, such as a piezoceramic sheet attached to the implement, and a circuit attached to the electroactive element. The circuit may be a shunt, or may include processing such as amplification and phase control to apply a driving signal which may compensate for strain sensed in the implement, or may simply alter the stiffness to affect performance. The electroactive element is located in a region of high strain to apply damping, and may include plural subassemblies mounted to capture energy in different planes, or to capture an asymmetric strain distribution while maintaining structural symmetry. In a ski the element captures between about one and five percent of the strain energy of the ski. The region of high strain may be found by modeling mechanics of the sports implement, or may be located by empirically mapping the strain distribution which occurs during use of the implement.

US Patent:

6532247, Mar 11, 2003

Filed:

Feb 27, 2001

Appl. No.:

09/794782

Inventors:

Ronald L. Spangler - Arlington MA
Robert N. Jacques - Andover MA
George J. Everage - Escondido CA
Stuart L. Anderson - San Diego CA
Frederick A. Palenschat - Lemon Grove CA
Igor V. Fomenkov - San Diego CA
Richard L. Sandstrom - Encinitas CA
William N. Partlo - Poway CA
John M. Algots - San Diego CA
Daniel J. W. Brown - San Diego CA

Assignee:

Cymer, Inc. - San Diego CA

International Classification:

H01S 322

US Classification:

372 57, 372 20, 372 99, 372102

Abstract:

An electric discharge laser with fast wavelength correction. Fast wavelength correction equipment includes at least one piezoelectric drive and a fast wavelength measurement system and fast feedback response times. In a preferred embodiment, equipment is provided to control wavelength on a slow time frame of several milliseconds, on a intermediate time from of about one to three millisecond and on a very fast time frame of a few microseconds. Techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver for tuning the laser wavelength using a tuning mirror. A preferred control technique is described (utilizing a very fast wavelength monitor) to provide the slow and intermediate wavelength control and a piezoelectric load cell in combination with the piezoelectric driver to provide the very fast (few microseconds) wavelength control.

US Patent:

6598322, Jul 29, 2003

Filed:

Jan 9, 2002

Appl. No.:

10/042851

Inventors:

Robert N. Jacques - Andover MA
Marco Giovanardi - Melrose MA
Huckleberry B. Dorn - Boston MA

Assignee:

Cymer, Inc. - San Diego CA

International Classification:

A43C 1100

US Classification:

36 501, 36 505, 36138, 36127

Abstract:

A shoe having at least one elongated shape memory alloy element and an electric circuit which when energized will produce a tightening of the shoe upper around the foot of a wearer. In a preferred embodiment, the shoe in one of a pair of golf shoes and the circuit in the shoe is energized by a switch in the heel that is turned on by the golfer clicking his heels together. Typically the golfer does this prior to each important swing of a golf club. A battery contained in the shoe provides a power source to produce a current in the circuit that heats the shape memory alloy causing it to reduce its length providing the tightening of the shoe uppers.

US Patent:

6650666, Nov 18, 2003

Filed:

Dec 21, 2001

Appl. No.:

10/027210

Inventors:

Ronald L. Spangler - Arlington MA
Robert N. Jacques - Andover MA
John A. Rule - Hingham MA
Frederick A. Palenschat - Lemon Grove CA
Igor V. Fomenkov - San Diego CA
John M. Algots - San Diego CA
Jacob P. Lipcon - Winchester MA
Richard L. Sandstrom - Encinitas CA

Assignee:

Cymer, Inc. - San Diego CA

International Classification:

H01S 310

US Classification:

372 20, 372 57

Abstract:

An electric discharge laser with fast wavelength correction. Fast wavelength correction equipment includes at least one piezoelectric drive and a fast wavelength measurement system and fast feedback response times. In a preferred embodiment, equipment is provided to control wavelength on a slow time frame of several milliseconds, on a intermediate time from of about one to five milliseconds and on a very fast time frame of a few microseconds. Preferred techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver for tuning the laser wavelength using a tuning mirror. A preferred control technique is described (utilizing a very fast wavelength monitor) to provide the slow and intermediate wavelength control with the combination of a stepper motor and a piezoelectric driver. Very fast wavelength control is provided with a piezoelectric load cell in combination with the piezoelectric driver. Preferred embodiments provide (1) fast feedback control based on wavelength measurements, (2) fast vibration control, (3) active damping using the load cell and an active damping module, (4) transient inversion using feed forward algorithms based on historical burst data.

US Patent:

6690704, Feb 10, 2004

Filed:

Jul 31, 2002

Appl. No.:

10/210761

Inventors:

John P. Fallon - Andover MA
Richard L. Sandstrom - Encinitas CA
William N. Partlo - San Diego CA
Alexander I. Ershov - San Diego CA
Toshihiko Ishihara - San Diego CA
John Meisner - San Diego CA
Richard M. Ness - San Diego CA
Paul C. Melcher - El Cajon CA
John A. Rule - Hingham MA
Robert N. Jacques - Andover MA

Assignee:

Cymer, Inc. - San Diego CA

International Classification:

H01S 322

US Classification:

372 58, 372 55

Abstract:

The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. Feedback timing control techniques are provided for controlling the relative timing of the discharges in the two chambers with an accuracy in the range of about 2 to 5 billionths of a second even in burst mode operation. This MOPA system is capable of output pulse energies approximately double the comparable single chamber laser system with greatly improved beam quality.

US Patent:

6853653, Feb 8, 2005

Filed:

Dec 21, 2001

Appl. No.:

10/036925

Inventors:

Ronald L. Spangler - Arlington MA, US
Jacob P. Lipcon - Winchester MA, US
John A. Rule - Hingham MA, US
Robert N. Jacques - Andover MA, US
Armen Kroyan - San Diego CA, US
Ivan Lalovic - San Diego CA, US
Igor V. Fomenkov - San Diego CA, US
John M. Algots - San Diego CA, US

Assignee:

Cymer, Inc. - San Diego CA

International Classification:

H01J003/10

US Classification:

372 20, 372 25, 372 30, 372 32

Abstract:

An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2. 0 millisecond.

US Patent:

6872961, Mar 29, 2005

Filed:

Mar 29, 2002

Appl. No.:

10/112443

Inventors:

Robert N. Jacques - Boston MA, US
David J. Warkentin - Boston MA, US

Assignee:

Cymer, Inc. - San Diego CA

International Classification:

G01N021/86
F16M013/00

US Classification:

250548, 248550

Abstract:

A motion control system for reducing vibration in moving components. The system includes a position control drive and a vibration control drive. At least one position sensor is used to provide feedback signals which are in turn used to provide control signals for both the position control drive and the vibration control drive. In a preferred embodiment the motion control system is applied to a stage of an integrated circuit lithography step and scan machine. The position control drives are linear magnetic actuators and the vibration control drives are electroceramic actuators. A laser interferometer position monitoring system is used to measure the position, speed, and acceleration of the stage system. Actuators apply controlled forces (based on measurements from the position monitoring system) to each stage to control the motion of the stage. Signals from the interferometer position system are also used to control vibration.

US Patent:

6959484, Nov 1, 2005

Filed:

Jan 27, 2000

Appl. No.:

09/491969

Inventors:

Ronald Spangler - Arlington MA, US
Emanuele Bianchini - Charlestown MA, US
Baruch Pletner - Newton MA, US
Betsy Marsh - Brookline MA, US
Robert Jacques - Andover MA, US

Assignee:

Cymer, Inc. - San Diego CA

International Classification:

B23P021/00
H01L041/08

US Classification:

29709, 29720, 29721, 29729, 29740, 29744, 29 2535, 310328, 310330, 310366

Abstract:

A vibration control system comprising an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The actuator may comprise one or more plates or elements of electro-active material bonded to an electroded sheet.