Robert D Grejda

US Patent:

20110122383, May 26, 2011

Filed:

Oct 20, 2010

Appl. No.:

12/908392

Inventors:

Robert D. Grejda - Fairport NY, US
Paul Francis Michaloski - Rochester NY, US

International Classification:

G03B 27/52
G02B 15/00
G02B 13/22

US Classification:

355 55, 359676, 359663

Abstract:

In a lithographic projection system, a corrective optic in the form of one or more deformable plates is mounted within telecentric image or object space for making one-dimensional or two-dimensional adjustments to magnification. The deformable plate, which can be initially bent under the influence of a preload, contributes weak magnification power that influences the magnification of the projection system by changing the effective focal length in object or image space. An actuator adjusts the amount of curvature through which the deformable plate is bent for regulating the amount of magnification imparted by the deformable plate.

US Patent:

20110292527, Dec 1, 2011

Filed:

May 27, 2010

Appl. No.:

12/788771

Inventors:

Jack Weston Frankovich - Fairport NY, US
Robert D. Grejda - Fairport NY, US
Keith E. Hanford - Macedon NY, US
Todd R. McMichael - Rochester NY, US

International Classification:

G02B 7/04

US Classification:

359824

Abstract:

An optical element mount has an inner member suspended within an outer member by a number of flexures. A first translational actuator is movable within the outer member and coupled to the inner member by a first shaft and is actuable to translate the inner member along a first substantially linear travel path within a translation plane that is orthogonal to an optical axis. A second translational actuator is movable within the outer member and coupled to the inner member by a second shaft and is actuable to translate the inner member along a second substantially linear travel path within the translation plane. A rotational actuator is movable within the outer member and coupled to the inner member by a third shaft and actuable to rotate the inner member about an instant point of rotation that is defined at the intersection of the first and second linear travel paths.

US Patent:

20140065303, Mar 6, 2014

Filed:

Mar 11, 2013

Appl. No.:

13/792964

Inventors:

Robert Dennis Grejda - Fairport NY, US
Keith Ernest Handford - Macedon NY, US

International Classification:

B05C 13/02

US Classification:

427162, 118500

Abstract:

A support apparatus for coating optical surfaces has a platen having one or more holes, wherein each of the one or more holes in the platen is featured to seat one or more edges of an optical element against the platen during surface coating, wherein the platen is formed of a machinable glass ceramic.

US Patent:

20200041248, Feb 6, 2020

Filed:

Jul 31, 2019

Appl. No.:

16/527917

Inventors:

- CORNING NY, US
John Weston Frankovich - Fairport NY, US
Robert Dennis Grejda - Fairport NY, US
Christopher Alan Lee - Pittsford NY, US
Matthew Ronald Millecchia - Fairport NY, US
Yoshihiro Nakamura - Saitama, JP

International Classification:

G01B 9/02
G03F 1/22
G01B 11/24

Abstract:

The methods disclosed herein include recording at near-vertical first and second measurement positions respective first and second interferograms of the photomask surface and defining a difference map as the difference between the first and second interferograms. Respective first and second normal forces on the photomask are also measured at the first and second measurement positions. The change in the normal force is used define a scaling factor, which is applied to the difference map to define a scaled difference map. A compensated flatness measurement with a reduced shape contribution due to gravity is obtained by subtracting the scaled difference map from the first interferogram. An interferometer-based flatness measurement system is also disclosed.

US Patent:

20180217309, Aug 2, 2018

Filed:

Feb 1, 2018

Appl. No.:

15/886245

Inventors:

- Corning NY, US
Robert Dennis Grejda - Fairport NY, US
Stephen Karl Mack - Rush NY, US
Robert Louis Michaels - Rochester NY, US
Paul Francis Michaloski - Rochester NY, US
Ducan Christopher Spaulding - Faiport NY, US

International Classification:

G02B 5/30
B23P 19/04

Abstract:

According to some embodiments a method of assembling an optical system comprises steps of: measuring retardance profiles of a plurality of optical elements, relatively positioning the optical elements in relative orientations that enhance complementarity between the retardance profiles of the optical elements, and securing the combinations of relatively oriented optical elements together, to control or minimize the combined retardance of the stacked optical elements.

US Patent:

20150070906, Mar 12, 2015

Filed:

Sep 6, 2013

Appl. No.:

14/020102

Inventors:

- Corning NY, US
Robert Dennis Grejda - Fairport NY, US
Keith Ernest Hanford - Macedon NY, US
Jean-Francois Oudard - Painted Post NY, US

Assignee:

CORNING INCORPORATED - Corning NY

International Classification:

G02B 1/10
B32B 37/26
B32B 37/14
F21V 5/04
G02B 1/11

US Classification:

362326, 156 60, 1563086

Abstract:

A lens assembly including a lens; a light absorber that does not transmit light with wavelengths from greater than or equal to about 250 nm to less than or equal to about 400 nm; a lens holder; and an adhesive configure to adhere the lens to the lens holder. The light absorber is positioned such that light having a wavelength from greater than or equal to about 190 nm to less than or equal to about 500 nm is not incident to the adhesive. A method including applying a light absorber, which does not transmit light with wavelengths from greater than or equal to about 190 nm to less than or equal to about 500 nm, to a lens; and configuring the light absorber and the adhesive so that the absorbed light is not incident to the adhesive.

US Patent:

20150064447, Mar 5, 2015

Filed:

Aug 28, 2013

Appl. No.:

14/012355

Inventors:

- Coming NY, US
Justin Paul Gales - Macedon NY, US
Robert Dennis Grejda - Fairport NY, US
Todd Robert McMichael - Rochester NY, US
Paul John Shustack - Elmira NY, US

Assignee:

Corning Incorporated - Coming NY

International Classification:

G02B 1/12
B32B 7/12
B32B 38/00
C08K 7/18

US Classification:

428331, 523466, 524543, 524559, 524577, 524555, 524560, 524548, 428414, 428448, 1562755

Abstract:

An optical device includes a support structure configured to retain an optical element using a cured adhesive composition that is disposed between a surface of the support structure and a surface of the optical element, wherein a structured optical particulate material is dispersed throughout the cured adhesive. The structured optical particulate material redirects curing radiation via a scattering mechanism to facilitate curing of portions of the adhesive compositions that cannot be directly exposed to the radiation, thereby facilitating rapid and more thorough curing than could otherwise be achieved without the structured optical particulate material.

US Patent:

20150009487, Jan 8, 2015

Filed:

Jun 30, 2014

Appl. No.:

14/318882

Inventors:

- Corning NY, US
Thomas James Dunn - Penfield NY, US
Robert Dennis Grejda - Fairport NY, US
Christopher Alan Lee - Pittsford NY, US

International Classification:

G01N 21/45
G02B 5/08
G01N 33/38
G01N 1/32
G01N 1/28

US Classification:

356 36, 359850

Abstract:

Thickness and group index variations in test strip samples of ultra-low expansion glass are made by extracting the strip samples with front and back faces oriented at an acute skew angle to the axis of the boule. The strip samples are positioned the within an interferometric measurement cavity so that a set of subcavities formed by pairings of each of two reference surfaces together with each of the front and back faces of the strip sample which each subcavity having a different optical path length spacing. The skew angle is sized to avoid diffusion effects of striae present in the boule.