Shoji Suzuki - San Jose CA, US Koji Adachi - San Jose CA, US Richard Shigetoshi Mori - Sunnyvale CA, US
Assignee:
Komag, Inc. - San Jose CA
International Classification:
B24B 5/00
US Classification:
451285, 287286, 287398
Abstract:
A carrier has openings for holding workpieces during polishing. Upper and lower polishing pads push against upper and lower surfaces of the workpieces, respectively. A ring is provided within the openings. This ring surrounds the workpieces, and prevents or reduces roll-off.