University of washington, microfabrication facility
Aug 2009
Position:
Research staff engineer
Education
Degree:
M. Eng.
School / High School:
Cornell University
1988 to 2001
Specialities:
Applied & Engineering Physics
Skills
Electron Beam Lithography • Thin Films • Microfabrication • Lithography • Semiconductors • Data Analysis • Metrology • Process Development • SPC • Silicon Photonics • Nanophotonics • SEM
A recording head for use with magnetic recording media has an improved structure, made by a simplified manufacturing process. The electrically insulating materials within the recording head are inorganic. The insulating materials are vacuum deposited, with no need to use a hard bake process that would be required for use of organic insulators. In one embodiment, the write gap is first masked, and then the coil is deposited on the write gap. A slightly larger area is then exposed within the mask, permitting insulation to be deposited over the coil. In a second embodiment, the coil and associated insulation are deposited and then milled to have a tapered configuration. This recording head also places the writing pole on a very flat surface, thereby allowing plated or deposited films to be easily manufactured to correspond to narrow track widths.
Lithography For Fast Processing Of Large Areas Utilizing Electron Beam Exposure
A lithography method combines both high gap resolution and high processing speed. An electron beam sensitive resist is applied to a substrate, followed by a photoresist. The undesired portions of the photoresist are removed through photolithography. An electron beam flood exposure or oxygen ashing is used to remove those portions of the electron beam sensitive resist not protected by the photoresist. An optical flood is used to remove the remaining photoresist. Electron beam lithography is then used to define narrow gaps within the remaining electron beam sensitive resist.
Resumes
Research Engineer At University Of Washington Microfabrication Facility
Research Staff Engineer at University of Washington, Microfabrication Facility
Location:
Seattle, Washington
Industry:
Nanotechnology
Work:
University of Washington, Microfabrication Facility since Aug 2009
Research Staff Engineer
Seagate Technology Apr 1999 - May 2009
Sr Staff Engineer
Northrop Grumman Apr 1996 - Apr 1999
Engineer
NNF / CNF / Cornell 1988 - 1996
Research Support Specialist
Education:
Cornell University 1988 - 2001
M. Eng., Applied & Engineering Physics
Cornell University 1983 - 1987
BS, Materials Science & Electrical Engineering
Skills:
Electron Beam Lithography Thin Films Microfabrication Lithography Semiconductors Data Analysis Metrology Process Development SPC Silicon Photonics Nanophotonics SEM
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