Philippe H Chelle

US Patent:

7419911, Sep 2, 2008

Filed:

Nov 10, 2004

Appl. No.:

10/984820

Inventors:

Philippe H. Chelle - Fremont CA, US
Robert J. Small - Tucson AZ, US

Assignee:

EKC Technology, Inc. - Hayward CA

International Classification:

B08B 1/00

US Classification:

438692, 438693, 510175, 252 791

Abstract:

This invention relates to compositions and methods for removing overfilled substrates, preferably at a relatively high removal rates. Advantageously, a composition according to the invention can contain an oxidizer, preferably a per-type oxidizer such as a peroxide, periodic acid, and peracetic acid, and may also optionally contain an abrasive.

US Patent:

8057696, Nov 15, 2011

Filed:

Aug 29, 2008

Appl. No.:

12/201459

Inventors:

Philippe H. Chelle - Fremont CA, US
Robert J. Small - Tucson AZ, US

Assignee:

DuPont Air Products NanoMaterials LLC - Tempe AZ

International Classification:

C09G 1/02

US Classification:

252 791, 438492, 510175, 216 89, 51308

Abstract:

This invention relates to compositions and methods for removing overfilled substrates, preferably at a relatively high removal rates. Advantageously, a composition according to the invention can contain an oxidizer, preferably a per-type oxidizer such as a peroxide, periodic acid, and peracetic acid, and may also optionally contain an abrasive.

US Patent:

20050194358, Sep 8, 2005

Filed:

Oct 26, 2004

Appl. No.:

10/972616

Inventors:

Philippe Chelle - Gilbert AZ, US

International Classification:

C23F001/00
H01L021/302
B44C001/22

US Classification:

216088000, 216089000, 438692000

Abstract:

Methods of manufacturing alumina abrasive for use in chemical mechanical polishing are described, wherein the abrasive is in a slurry having gamma alumina formed in a low temperature fuming process, water, an acid sufficient to maintain the pH below about 7, wherein the slurry does not settle appreciably in an 8 to 24 hour period. Advantageously, the alumina is wet-milled without the use of wet-milling salt additives.