Paul E Colombo

US Patent:

6367267, Apr 9, 2002

Filed:

Sep 22, 2000

Appl. No.:

09/668772

Inventors:

Paul E. Colombo - White Bear Lake MN

Assignee:

Applied EPI, Inc. - St. Paul MN

International Classification:

B01D 800

US Classification:

62 555, 62 505

Abstract:

An integrated phase separator for use in an ultra high vacuum system, for example, a molecular beam epitaxy system, is described. The vacuum chamber has a cryogenic panel disposed therein. The cryogenic panel includes a cryogenic shroud region and a phase separator region. Liquid nitrogen is introduced into the cryogenic panel via an inlet line. As the liquid nitrogen warms and vaporizes, nitrogen vapor rises within the shroud. The phase separator region within the cryogenic panel provides a near atmospheric pressure vapor barrier over the liquid nitrogen so that the nitrogen vapor may escape smoothly through the outlet of the panel, without forming gas bursts. Also, the phase separator region is vacuum jacketed to prevent cryogenic shroud surface temperature changes due to variations in liquid nitrogen levels, thereby increasing the cryogenic shrouds pumping stability.

US Patent:

6718775, Apr 13, 2004

Filed:

Jul 30, 2002

Appl. No.:

10/209111

Inventors:

Paul E. Colombo - White Bear Lake MN
Scott Wayne Priddy - Saint Louis Park MN

Assignee:

Applied EPI, Inc. - St. Paul MN

International Classification:

B01D 800

US Classification:

62 555, 62 505, 118688

Abstract:

An integrated phase separator for use in an ultra high vacuum system, for example, a molecular beam epitaxy system, is described. The vacuum chamber has a cryogenic panel disposed therein. The cryogenic panel includes a cryogenic shroud region and a phase separator region. Liquid nitrogen is introduced into the cryogenic panel via an inlet line. As the liquid nitrogen warms and vaporizes, nitrogen vapor rises within the shroud. The phase separator region within the cryogenic panel provides a near atmospheric pressure vapor barrier over the liquid nitrogen so that the nitrogen vapor may escape smoothly through the outlet of the panel, without forming gas bursts. Also, the phase separator region is vacuum jacketed to prevent cryogenic shroud surface temperature changes due to variations in liquid nitrogen levels, thereby increasing the cryogenic shrouds pumping stability. In one embodiment, used in molecular beam epitaxy (MBE), the cryopanel is divided into first and second cooling chambers. The first cooling chamber contains liquid nitrogen and surrounds the substrates to be coated, while the second cooling chamber contains a different fluid such as water, and surrounds the effusion cells so as to dissipate heat generated during the operation of effusion cells.

US Patent:

58273719, Oct 27, 1998

Filed:

Aug 29, 1996

Appl. No.:

8/705535

Inventors:

Paul E. Colombo - White Bear Lake MN
Robert F. Donadio - Hudson NH

Assignee:

Chorus Corporation - White Bear Lake MN

International Classification:

C23C 1654
F27B 1408

US Classification:

118726

Abstract:

A unibody, monolithic, one-piece negative draft crucible for an MBE effusion source. The crucible maximizes capacity, uniformity and long term flux stability, and minimizes oval defects, depletion effects, and short term shutter-related flux transients. The invention also includes an effusion source employing such a crucible, as well as a method and mandrel apparatus for making a unibody containment structure, such as a crucible formed of PBN, having a negative draft, via chemical vapor deposition.

US Patent:

58206817, Oct 13, 1998

Filed:

May 3, 1995

Appl. No.:

8/433033

Inventors:

Paul E. Colombo - White Bear Lake MN
Robert F. Donadio - Hudson NH

Assignee:

Chorus Corporation - White Bear Lake MN

International Classification:

F27B 1410

US Classification:

118726

Abstract:

A unibody, monolithic, one-piece negative draft crucible for a MBE effusion cell. The crucible maximizes capacity, uniformity and long term flux stability, and minimizes oval defects, depletion effects, and short term shutter-related flux transients. The invention also provides a method and mandrel apparatus for making a unibody containment structure, such as a crucible formed of PBN, having a negative draft, via chemical vapor deposition.

US Patent:

57639981, Jun 9, 1998

Filed:

Sep 14, 1995

Appl. No.:

8/528200

Inventors:

Paul Colombo - White Bear Lake MN
James E. Tolan - Edina MN
Kevin J. Hubbard - Stillwater MN

Assignee:

Chorus Corporation - White Bear Lake MN

International Classification:

H01J 718

US Classification:

313495

Abstract:

A method of manufacturing a tri-plate vacuum-sealed field emission type display facilitates mass production ex-situ. The method is based on a plate including an anode plate, a backing plate including at least one sealed access orifice, and a cathode/substrate plate secured between the anode plate and the backing plate. The cathode/substrate plate is vented in the active area, with a multitude of pass-through apertures, each aperture being conically shaped to optimize uninterrupted travel of damaging gas molecules to a getter located on the opposite side. Before sealing the access orifice in the backing plate, the orifice is used to decontaminate the inside of the display with a cleaning gas and to insert a granule form of getter.

US Patent:

45530220, Nov 12, 1985

Filed:

Jun 4, 1984

Appl. No.:

6/616743

Inventors:

Paul Colombo - New Brighton MN

Assignee:

The Perkin-Elmer Corporation - Norwalk CT

International Classification:

C23C 1312

US Classification:

219275

Abstract:

An effusion cell assembly includes a self-supporting element disposed within a housing member. The self-supporting element provides efficient heat transfer to a crucible positioned therein and permits operation at relatively lower filament tempertures.

US Patent:

60304588, Feb 29, 2000

Filed:

Jul 3, 1997

Appl. No.:

8/887554

Inventors:

Paul E. Colombo - White Bear Lake MN
Scott Priddy - St. Louis Park MN

Assignee:

Chorus Corporation - White Bear Lake MN

International Classification:

C23C 1400

US Classification:

118719

Abstract:

This invention is a sublimating and cracking apparatus for producing a beam of molecules to be deposited on a substrate, and an apparatus which is particularly useful with phosphorus as the source material. In the phosphorus effusion cell of this invention, a vacuum jacket encloses and supports a red phosphorus crucible, a condensing crucible for white phosphorus and a connecting tube within a vacuum space. In use, red phosphorus is first transformed and deposited as white phosphorus in the condensing chamber. The white phosphorus is then directed to a cracker section where it is cracked and subsequently directed to the substrate.

US Patent:

56931735, Dec 2, 1997

Filed:

Dec 21, 1994

Appl. No.:

8/361055

Inventors:

Paul E. Colombo - White Bear Lake MN
Scott W. Priddy - St. Louis Park MN

Assignee:

Chorus Corporation - White Bear Lake MN

International Classification:

C23C 1400

US Classification:

156345

Abstract:

An atomic hydrogen source. The source has an elongated cylindrical structure with proximal and distal or inner and outer ends. A head structure is disposed at the proximal end for communicative connection with electrical power, gas, temperature control and related systems. A mounting flange is disposed along the length of the source for connection with an MBE or other apparatus. A tube structure is disposed at the distal end for extension into the apparatus. The tube structure includes gas and power conduction elements, including a high temperature resistive filament for cracking gas.