Suzanne Coley - Mansfield MA, US Peter Trefonas - Medway MA, US Patricia Fallon - Newton MA, US Gerald Wayton - Leicester MA, US
Assignee:
Rohm and Haas Electronic Materials, L.L.C. - Marlborough MA
International Classification:
G03F 7/00 G03F 7/004
US Classification:
430330000, 430009000, 430322000, 430270100
Abstract:
Compositions and methods are provided that can reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing or via-fill layer. Preferred coating composition and methods of the invention can provide enhanced resolution of a patterned overcoated photoresist layer and include use of low activation temperature thermal acid generators as well as multiple thermal treatments to process a layer of the underlying coating composition.
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Patricia Fallon Vice-President
Town of Boxborough Executive Office · Municipality
Kahleb Fallon, 10, hugs his grandmother Patricia Fallon as they remember Kahleb's mother, Jamie Fallon, who died in the Pentagon attack, at the 10th Anniversary 9/11 Remembrance Ceremony at the Pentagon in Arlington.