Norman E Parker

US Patent:

45567948, Dec 3, 1985

Filed:

Jan 30, 1985

Appl. No.:

6/696616

Inventors:

James W. Ward - Canoga Park CA
Herbert Schlanger - Simi Valley CA
Hugh McNulty - Santa Monica CA
Norman W. Parker - Camarillo CA

Assignee:

Hughes Aircraft Company - El Segundo CA

International Classification:

G01N 2300
H01J 3726

US Classification:

250309

Abstract:

A secondary ion collection and transport system, for use with an ion microprobe, which is very compact and occupies only a small working distance, thereby enabling the primary ion beam to have a short focal length and high resolution. Ions sputtered from the target surface by the primary beam's impact are collected between two arcuate members having radii of curvature and applied voltages that cause only ions within a specified energy band to be collected. The collected ions are accelerated and focused in a transport section consisting of a plurality of spaced conductive members which are coaxial with and distributed along the desired ion path. Relatively high voltages are applied to alternate transport sections to produce accelerating electric fields sufficient to transport the ions through the section to an ion mass analyzer, while lower voltages are applied to the other transport sections to focus the ions and bring their velocity to a level compatible with the analyzing apparatus.

Author:

Norman Parker

ISBN #:

0805914331

Author:

Norman Scott Parker

ISBN #:

0937174017