Nilufa Rahim

US Patent:

20120187974, Jul 26, 2012

Filed:

Jan 20, 2011

Appl. No.:

13/010081

Inventors:

Roger A. Dufresne - Fairfax VT, US
Charles B. LaRow - Burlington VT, US
Travis S. Merrill - Rutland VT, US
Nilufa Rahim - Somerset NJ, US
Ernest Y. Wu - Essex Junction VT, US

Assignee:

INTERNATIONAL BUSINESS MACHINES CORPORATION - Armonk NY

International Classification:

G01R 31/26

US Classification:

32476201

Abstract:

A testing system for testing the integrity of a gate dielectric includes a testing apparatus, the testing apparatus including a test probe configured to contact and provide a voltage across the gate dielectric and to measure a current passing through the gate dielectric. The testing system also includes a computing device coupled to the testing apparatus an causing the testing apparatus to apply a constant voltage as part of a first test to the gate dielectric through the test probe until a first predetermined current is measured passing through the gate dielectric and to apply an increasing voltage to the gate dielectric after the first predetermined current is measured.