Citi
Manager
Pwc
Senior Associate
Pwc Mar 2015 - Mar 2016
Associate
Suresh Surana & Associates Llp Mar 2014 - Feb 2015
Audit Associate
Suresh Surana & Associates Llp Mar 2011 - Feb 2014
Article Trainee
Education:
The Institute of Chartered Accountants of India 2010 - 2014
Laxmi Education Societys Chinai College of Commerce & Economics Dr S Radhakrishnan Marg Andheri East Mumbai 400 069 2006 - 2009
Bachelor of Commerce, Bachelors
Applied Materials
Strategic Marketing Director, Fabvantage Technology Services
Applied Materials
Product Marketing Director, Strategic Programs
Applied Materials
Global Product Manager Senior Etch Products
Novellus Systems Jul 1998 - Sep 2011
Senior Manager at Novellus Systems Inc
Nasa Ames Research Center 1996 - 1998
Principal Engineer
Education:
San Jose State University 1996 - 1998
Master of Science, Masters, Chemical Engineering
University of California, Berkeley 1989 - 1993
Bachelors, Bachelor of Science, Chemical Engineering
Skills:
Semiconductor Industry Semiconductors Thin Films Design of Experiments Engineering Management Spc Failure Analysis Product Management Manufacturing Process Engineering Product Development Electronics Cross Functional Team Leadership Metrology Product Engineering R&D Silicon Management Jmp Process Simulation Process Integration Ic R
Benign Polyps of the Colon Cholelethiasis or Cholecystitis Chronic Pancreatitis Diverticulosis Esophagitis
Languages:
English
Description:
Dr. Trivedi graduated from the Ross Univ, Sch of Med, Roseau, Dominica in 2002. He works in Thousand Oaks, CA and 1 other location and specializes in Gastroenterology and Internal Medicine. Dr. Trivedi is affiliated with Los Robles Hospital & Medical Center and Simi Valley Hospital.
Low Leakage Current Silicon Carbonitride Prepared Using Methane, Ammonia And Silane For Copper Diffusion Barrier, Etchstop And Passivation Applications
Srinivasan Sundararajan - Sunnyvale CA Mayur Trivedi - Fremont CA
Assignee:
Novellus Systems, Inc. - San Jose CA
International Classification:
H01L 2348
US Classification:
257751, 257758, 257762, 257767
Abstract:
A silicon carbon nitride (SiCN) layer is provided which has a low leakage current and is effective in preventing the migration or diffusion of metal or copper atoms through the SiCN layer. The SiCN layer can be used as a diffusion barrier between a metal portion (such as a copper line or via) and an insulating dielectric to prevent metal atom diffusion into the dielectric. The SiCN layer can also be used as an etchstop or passivation layer. The SiCN layer can be applied in a variety ways, including PECVD (e. g. , using SiH , CH , and NH ) and HDP CVD (e. g. , using SiH , C H , and N ).
Srinivasan Sundararajan - Sunnyvale CA Mayur Trivedi - Fremont CA
Assignee:
Novellus Systems, Inc. - San Jose CA
International Classification:
H01L 214763
US Classification:
438627, 438780
Abstract:
A silicon carbon nitride (SiCN) layer is provided which has a low leakage current and is effective in preventing the migration or diffusion of metal or copper atoms through the SiCN layer. The SiCN layer can be used as a diffusion barrier between a metal portion (such as a copper line or via) and an insulating dielectric to prevent metal atom diffusion into the dielectric. The SiCN layer can also be used as an etchstop or passivation layer. The SiCN layer can be applied in a variety ways, including PECVD (e. g. , using SiH , CH , and NH ) and HDP CVD (e. g. , using SiH , C H , and N ).
Apparatus For Depositing A Cobalt Layer Using A Carousel Batch Deposition Reactor
Methods and apparatus for depositing a cobalt layer in features formed on a substrate are provided herein. In some embodiments, a substrate processing chamber includes: a chamber body having a processing volume; a rotatable substrate support disposed within the chamber body, wherein the substrate support is configured to rotate one or more substrates arranged in a planar array between a first processing position and a second processing position, wherein the first processing position and the second processing position are independently thermally controlled; a showerhead disposed opposite the rotatable substrate support configured to expose the one or more substrates at the first processing position to a cobalt containing precursor; and a heat source disposed within the substrate support configured to heat the one or more substrates at the second processing position.
Methods And Apparatus For Depositing A Cobalt Layer Using A Carousel Batch Deposition Reactor
Methods and apparatus for depositing a cobalt layer in features formed on a substrate are provided herein. In some embodiments, a method of depositing a cobalt layer atop a substrate includes: (a) providing a substrate to a substrate support that is rotatable between two processing positions; (b) exposing the substrate to a cobalt containing precursor at a first processing position to deposit a cobalt layer atop the substrate, wherein the substrate at the first processing position is at a first temperature; (c) rotating the substrate to a second processing position; and (d) annealing the substrate at the second processing position to remove contaminants from the cobalt layer, wherein the substrate at the second processing position is at a second temperature greater than the first temperature.
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