Maurice H Yang

US Patent:

44620187, Jul 24, 1984

Filed:

Nov 5, 1982

Appl. No.:

6/439282

Inventors:

Maurice Yang - Costa Mesa CA
Carlyle A. Mounteer - Irvine CA

Assignee:

Gulton Industries, Inc. - Costa Mesa CA

International Classification:

G01L 122
G01B 720

US Classification:

338 3

Abstract:

A transducer operating on the strain gauge principle having integral temperature compensation and calibration resistors is disclosed. In the presently preferred embodiment, a silicon dioxide layer is disposed on a silicon substrate. Platinum alloy strain gauge resistors are disposed on the silicon dioxide layer and form a Wheatstone bridge circuit configuration. Laser trimable chromium nitride, platinum alloy and gold temperature compensation and calibration resistors are formed on the silicon dioxide layer from the same films used to form the strain gauge, adhesion layers, conductors and bonding pads, to permit the transducer to be calibrated such that its electrical characteristics are in conformance to specified tolerances when the transducer is subjected to temperature variations.