Mark A Henderson

Author:

Mark Henderson

ISBN #:

0199277745

Author:

Mark Henderson

ISBN #:

0071402608

Author:

Mark Henderson

ISBN #:

0864920954

US Patent:

6634935, Oct 21, 2003

Filed:

Apr 18, 2002

Appl. No.:

10/126469

Inventors:

Douglas W. Young - Sunnyvale CA
Mark Henderson - Newark CA
Bernard M. Frey - Berkeley CA

Assignee:

Nutool, Inc. - Milpitas CA

International Classification:

B24B 2104

US Classification:

451168, 451 11, 451296, 451312

Abstract:

Described is a method and apparatus for producing bi-directional linear polishing that uses a flexible pad. In one aspect, a horizontal drive assembly moves a horizontal slide member that is horizontally moveable over rails attached to a single casting. Openings within the casting exist for the inclusion of the supply spool, the receive spool and the pad path rollers. A drive assembly translates the rotational movement of a motor into the horizontal bi-directional linear movement of the horizontal slide member. With the polishing pad properly locked in position, preferably being attached between a supply spool and the receive spool, horizontal bi-directional linear movement of the horizontal slide member creates a corresponding horizontal bi-directional linear movement of a portion of the polishing pad. Thus, the portion of the polishing pad disposed within a polishing area of the chemical mechanical polishing apparatus can polish a top front surface of a wafer using the bi-directional linear movement of the portion of the polishing pad.

US Patent:

20050168460, Aug 4, 2005

Filed:

Apr 4, 2003

Appl. No.:

10/510326

Inventors:

Anshuman Razdan - Phoenix AZ, US
Jeremy Rowe - Mesa AZ, US
Daniel Collins - Tempe AZ, US
Gerald Farin - Paradise Valley AZ, US
Peter McCartney - Chandler AZ, US
Gregory Nielson - Mesa AZ, US
Arleyn Simon - Tempe AZ, US
Mark Henderson - Chandler AZ, US
Mathew Tocheri - Tempe AZ, US
David Capco - Tempe AZ, US
Jiuxiang Hu - Tempe AZ, US
Mary Marke - Tempe AZ, US

International Classification:

G06T015/00

US Classification:

345419000

Abstract:

A computer system () and method for the storage, archiving, query and retrieval of information relating to 3D objects is provided. The système includes data acquisition () means for requiring point coordinate data about a three-dimensional object, a database component (), a processor () and a user interface (). The processor () is operable to generate modeled data () from the point coordinate data and to segment the modeled data () into feature data () representing a plurality of features of the object (). The data is organized so that features of the 3D objects can be automatically extracted for online query and retrieval. The processor () is operable to store the modeled data () and the feature data () in the database component () and retrieve modeled data () and feature data () from the database component () using search criteria representing oobject features of interest. The user interface () is operative with the processor () to allow a user input search criteria to processor () and to display data retrieved by the processor as a representation of an object feature.