Magdel Crum

US Patent:

20050026547, Feb 3, 2005

Filed:

Aug 31, 2004

Appl. No.:

10/931526

Inventors:

Scott Moore - Meridian ID, US
Scott Meikle - Gainesville VA, US
Magdel Crum - Albuquerque NM, US

International Classification:

B24B049/00
B24B005/00

US Classification:

451005000, 451008000, 451287000

Abstract:

Semiconductor processor systems, systems configured to provide a semiconductor workpiece process fluid, semiconductor workpiece processing methods, methods of preparing semiconductor workpiece process fluid, and methods of delivering semiconductor workpiece process fluid to a semiconductor processor are provided. One aspect of the invention provides a semiconductor processor system including a process chamber adapted to process at least one semiconductor workpiece using a process fluid; a connection coupled with the process chamber and configured to receive the process fluid; a sensor coupled with the connection and configured to output a signal indicative of the process fluid; and a control system coupled with the sensor and configured to control at least one operation of the semiconductor processor system responsive to the signal.