David M. Dozor - Tucson AZ, US Yullin Kim - Tucson AZ, US Kris Tumidajski - Tucson AZ, US Gary Fancher - Tucson AZ, US Ken Salvestrini - Tucson AZ, US Douglas Holt - Gilbert AZ, US Ron DeWitt, JR. - Tucson AZ, US
International Classification:
G01N 21/88 G02B 27/56 G02B 7/02
US Classification:
3562372, 359811, 359507, 359509, 359819
Abstract:
An inspection system including a lens. In one instance, the lens is a solid immersion lens. The inspection system includes a component or components for providing a self aligning solid immersion lens arrangement in order to allow at most a small distance between the solid immersion lens and a device under test and components or components for constraining a force exerted on the device under test. The inspection system may include a “purge” port, or a thermal isolation configuration or an anti-contamination component. The inspection system may include software and hardware to prevent crashing of the lens. The inspection system may also include a method for ensuring that various objective lenses can be replaced while maintaining the intended spacing between lenses.