Wayne A. Anderson - Hamburg NY Quanxi Jia - Los Alamos NM Junsin Yi - Amherst NY
Assignee:
Research Foundation of State University of New York - Albany NY
International Classification:
H01G 410
US Classification:
361313
Abstract:
The invention relates to a method for forming a high capacitance thin film capacitor comprising forming layers of dielectric material in amorphous, nanocrystalline and polycrystalline configuration and arranging the resulting layers between upper and lower electrodes. The invention further comprises dielectric articles such as capacitors formed in accordance with the method of the invention and includes their use in an electronic circuit.