Junhan Yuh

US Patent:

20130284373, Oct 31, 2013

Filed:

Nov 28, 2012

Appl. No.:

13/687512

Inventors:

Biraja P. Kanungo - San Jose CA, US
Junhan Yuh - Palo Alto CA, US
Dmitry Lubomirsky - Cupertino CA, US

Assignee:

APPLIED MATERIALS, INC. - Santa Clara CA

International Classification:

C23F 1/08
B23K 10/00
H05K 1/05
B05D 3/00

US Classification:

15634534, 4271262, 21912151, 174255

Abstract:

To manufacture a ceramic coated article, at least one surface of a conductive article is roughened to a roughness of approximately 100 micro-inches (μin) to approximately 300 μin. The conductive article may then be heated and coated with a ceramic coating comprising a yttrium containing oxide to a thickness of approximately 10-40 mil.