Joseph T Gutierrez

US Patent:

20220276639, Sep 1, 2022

Filed:

Jul 14, 2021

Appl. No.:

17/375374

Inventors:

- Milpitas CA, US
Ramon Olavarria - Fremont CA, US
Joseph Gutierrez - Santa Clara CA, US
Ravi Bhagat - Milpitas CA, US
Assaf Kantorovich - Morgan Hill CA, US

International Classification:

G05B 19/418

Abstract:

In some embodiments, a method is performed at a computer system of a manufacturer. The manufacturer operates a manufacturing facility that includes equipment from an equipment supplier. In the method, a request is received for electronic access by the equipment supplier to the manufacturing facility to perform a remote support activity for the equipment. The request is routed to predefined approvers. Approval of the request is received from the predefined approvers. In response to receiving approval of the request from the predefined approvers, a connection is automatically created between an electronic device in the manufacturing facility and a computer system for the equipment supplier. The connection is used for the remote support activity. Upon completion of the remote support activity, the connection is automatically terminated.

US Patent:

20190311928, Oct 10, 2019

Filed:

Jun 23, 2019

Appl. No.:

16/449400

Inventors:

- Milpitas CA, US
Joseph GUTIERREZ - Santa Clara CA, US
Krishna RAO - San Ramon CA, US

International Classification:

H01L 21/67
G05B 19/418
G06N 7/00

Abstract:

A high-dimensional variable selection unit determines a list of critical parameters from sensor data and parametric tool measurements from a semiconductor manufacturing tool, such as a semiconductor inspection tool or other types of semiconductor manufacturing tools. The high-dimensional variable selection model can be, for example, elastic net, forward-stagewise regression, or least angle regression. The list of critical parameters may be used to design a next generation semiconductor manufacturing tool, to bring the semiconductor manufacturing tool back to a normal status, to match a semiconductor manufacturing tool's results with that of another semiconductor manufacturing tool, or to develop a specification for the semiconductor manufacturing tool.

US Patent:

20160163574, Jun 9, 2016

Filed:

Dec 1, 2015

Appl. No.:

14/955752

Inventors:

- Milpitas CA, US
Joseph GUTIERREZ - Santa Clara CA, US
Krishna RAO - San Ramon CA, US

International Classification:

H01L 21/67
G06N 7/00

Abstract:

A high-dimensional variable selection unit determines a list of critical parameters from sensor data and parametric tool measurements from a semiconductor manufacturing tool, such as a semiconductor inspection tool or other types of semiconductor manufacturing tools. The high-dimensional variable selection model can be, for example, elastic net, forward-stagewise regression, or least angle regression. The list of critical parameters may be used to design a next generation semiconductor manufacturing tool, to bring the semiconductor manufacturing tool back to a normal status, to match a semiconductor manufacturing tool's results with that of another semiconductor manufacturing tool, or to develop a specification for the semiconductor manufacturing tool.