Michael Goldstein - Ridgefield CT, US John M. Urata - Norwalk CT, US
Assignee:
Intel Corporation - Santa Clara CA
International Classification:
G02B 9/00 G02B 9/08 G03B 27/54
US Classification:
359738, 355 67
Abstract:
The present invention describes an apparatus comprising an optical array generating a distribution of partial coherence of light energy and an aperture to select a subset of said distribution of partial coherence.
Enhancing Light Coupling Efficiency For Ultra High Numerical Aperture Lithography Through First Order Transmission Optimization
Christof Krautschik - Cupertino CA, US Maciek Orczyk - Cupertino CA, US John Urata - Portland OR, US
International Classification:
B32B001/00 G02B001/10
US Classification:
359/580000
Abstract:
A first order transmission optimization (FOTO) top coat may be provided on a photoresist layer to improve the coupling efficiency of first order diffracted light waves during a lithographic imaging operation. The top coat may be a relatively thin layer of a relatively low absorption, low refractive index material. The top coat may be provided in addition to a bottom anti-reflective coating (BARC).
Wavefront Engineering With Off-Focus Mask Features
An imaging part such as a mask or reticle includes a patterned layer in an on-axis plane of the imaging part. The imaging part further includes another layer including sub-resolution features, where the another layer is positioned in an off-axis plane of the imaging part.
Adjustment Of The Partial Coherence Of The Light Energy In An Imaging System
Michael Goldstein - Ridgefield CT John M. Urata - Norwalk CT
Assignee:
Intel Corporation - Santa Clara CA
International Classification:
G02B 900
US Classification:
359738, 359739, 355 53, 355 67
Abstract:
The present invention describes an apparatus comprising an optical array generating a distribution of partial coherence of light energy and an aperture to select a subset of said distribution of partial coherence.
Drafting Aide (GIS) at City of San Diego Fire-Rescue Department
Location:
San Diego, California
Industry:
Public Safety
Work:
City of San Diego Fire-Rescue Department since Jul 2010
Drafting Aide (GIS)
Samahan Filipino American Performing Arts & Education Center 2002 - 2011
Dance Company Member
San Diego State University Geography Department Sep 2008 - May 2010
Graduate Assistant
United States Geological Survey - California Water Science Center May 2007 - Sep 2008
Geographer (GIS)
Education:
Claremont Graduate University 2012 - 2016
Doctor of Philosophy (Ph.D.), Information Systems and Technology (Concentration: GIS Solution Development)
San Diego State University-California State University 2008 - 2012
Master of Science (M.S.), Geography (Concentration: Geographic Information Science)
San Diego State University-California State University 2002 - 2008
Bachelor of Science (B.S.), Geography (Concentration: Geographic Information Science) & Japanese; Minor: Computer Science
Mt. Carmel High School
Interests:
GIS Solution Development,
Geographic Information Science,
Geovisualization,
Cartography,
International Travel,
Amateur Photography,