Jeffrey M Markakis

US Patent:

20090032706, Feb 5, 2009

Filed:

Aug 2, 2007

Appl. No.:

11/832881

Inventors:

Craig Prater - Goleta CA, US
Chanmin Su - Ventura CA, US
Nghi Phan - Santa Barbara CA, US
Jeffrey M. Markakis - Santa Barbara CA, US
Craig Cusworth - Redding CA, US
Jian Shi - Goleta CA, US
Johannes H. Kindt - Santa Barbara CA, US
Steven F. Nagle - Santa Barbara CA, US
Wenjun Fan - Oxnard CA, US

International Classification:

G01N 23/00

US Classification:

250307, 250310

Abstract:

A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.

US Patent:

20130168929, Jul 4, 2013

Filed:

Dec 30, 2011

Appl. No.:

13/341777

Inventors:

Andrew N. Erickson - Santa Barbara CA, US
Jeffrey M. Markakis - Santa Barbara CA, US
Anton Riley - Solvang CA, US

Assignee:

MULTIPROBE, INC. - Santa Barbara CA

International Classification:

B23B 31/30
B23Q 7/00

US Classification:

279 3, 29559

Abstract:

A semiconductor wafer processing tool has a support structure for a coarse motion positioning system. A measurement head having a rigid super structure is supported from the support structure by vibration isolators and a top plate is mounted to the super structure. A vacuum transfer chuck is releasably carried by the coarse motion positioning system and releasably adherable to the top plate by application of vacuum. The vacuum transfer chuck supports a semiconductor wafer.

US Patent:

20200141971, May 7, 2020

Filed:

Jun 7, 2018

Appl. No.:

16/619752

Inventors:

- Langenlois, AT
Georg E. FANTNER - Chavannes-Rennes, CH
Jeffrey M. MARKAKIS - Santa Barbara CA, US

International Classification:

G01Q 30/02
B23Q 1/34
G01Q 10/04
G01Q 60/38
G01Q 70/02

Abstract:

A device for microscopically precise positioning and guidance of a measurement or manipulation element in at least two spatial axes, comprising an outer base with side walls defining a base interior, and an xy-stage having side walls and mounting means for at least one measurement or manipulation element, the xy-stage being arranged inside of the base interior and being displaceable in an XY-plane relative to the outer base. The xy-stage is coupled to the outer base with bending elements, and with actuators designed for displacing the xy-stage relative to the outer base. The outer base is provided with at least one stiffening element rigidly connected to the side walls of the outer base, and/or that the xy-stage is provided with at least one stiffening element rigidly connected to the side walls of the xy-stage.