age ~37
from Richmond, VA
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts ...
Author
Francis F. Chen, Jane P. Chang
Binding
Paperback
Pages
208
Publisher
Springer
ISBN #
0306474972
EAN Code
9780306474972
ISBN #
2