James M Ekberg

US Patent:

20050227595, Oct 13, 2005

Filed:

Apr 9, 2004

Appl. No.:

10/821758

Inventors:

David Marquardt - Phoenix AZ, US
Joe Koeth - Chandler AZ, US
James Crawford - Chandler AZ, US
James Ekberg - Tempe AZ, US
Antoni Jakubiec - San Jose CA, US
Michael Smigel - Phoenix AZ, US
John Stumpf - Phoenix AZ, US

International Classification:

B24B005/00

US Classification:

451285000

Abstract:

In accordance with one embodiment of the invention, a load cup mechanism is provided for loading and unloading apparatus such as a CMP apparatus. The load cup mechanism, configured to load a work piece into and to unload a work piece from the apparatus, comprises a load cup arm configured to pivot about an axis between a load position aligned with the apparatus and an off-load position. A work piece platform is coupled to an end of the load cup arm and a plurality of lift fingers and a plurality of guide fingers, configured to support and center a work piece, are spaced about the work piece platform. A plurality of guide posts are spaced apart about the periphery of the work piece platform and are configured to align the work piece platform, in the load position, to the processing apparatus.