Hui Wang - Fremont CA, Afnan Muhammed - Fremont CA, Jian Wang - Fremont CA, Felix Gutman - San Jose CA, Frederick Ho - San Jose CA,
ACM RESEARCH INC. - FREMONT CALIFORNIA CA
A metal layer formed on a wafer, the wafer having a center portion and an edge portion, is electropolished by aligning a nozzle and the wafer to position the nozzle adjacent to the center portion of the wafer. The wafer is rotated. As the wafer is rotated, a stream of electrolyte is applied from the nozzle onto a portion of the metal layer adjacent to the center portion of the wafer to begin to electropolish the portion of the metal layer with a triangular polishing profile to initially expose an underlying layer underneath the metal layer at a point.
Dr. Ho graduated from the University of Nebraska College of Medicine in 1966. He works in West Covina, CA and 1 other location and specializes in Allergy & Immunology. Dr. Ho is affiliated with Huntington Memorial Hospital.