A multilayer antireflection coating for a temperature sensitive substrate such as plastic. One layer is a DC reactively sputtered metal oxide which may be deposited quickly and without imparting a large amount of heat to the substrate. Another layer has a refractive index lower than the substrate.
A method and apparatus for providing uniform coatings of lithium on a substrate are provided. In one aspect of the present invention is a method of selectively controlling the uniformity and/or rate of deposition of a metal or lithium in a sputter process by introducing a quantity of reactive gas over a specified area in the sputter chamber. This method is applicable to planar and rotating targets.
SAGE Electrochromics, Inc. - Faribault MN, US Erik Bjornard - Northfield MN, US
Assignee:
SAGE Electrochromics, Inc. - Faribault MN
International Classification:
C23C 14/34
US Classification:
2041921, 20429807
Abstract:
A method and apparatus for providing uniform coatings of lithium on a substrate are provided. In one aspect of the present invention is a method of selectively controlling the uniformity and/or rate of deposition of a metal or lithium in a sputter process by introducing a quantity of reactive gas over a specified area in the sputter chamber. This method is applicable to planar and rotating targets.
Robert Anglemier - Waterville MN, US Bryan D. Greer - Northfield MN, US Rino Messere - Herzogenrath, DE Jerome Korus - Lakeville MN, US Erik Bjornard - Northfield MN, US
Assignee:
SAGE Electrochromics, Inc. - Faribault MN
International Classification:
E06B 3/66 E06B 3/667
US Classification:
52204593, 403294
Abstract:
An insulative separation element bridges first and second conductive spacer ends of a spacer frame of an active or insulated glazing unit. The insulative separation element includes first and second outer sections dimensioned for placement into the first and second conductive spacer ends. The insulative separation element includes an intermediate section connecting the first and second outer sections. The intermediate section has opposing first and second faces dimensioned for abutment with and insulative separation of the first and second spacer ends, respectively.
Film Thickness Uniformity Control Apparatus For In-Line Sputtering Systems
Erik J. Bjornard - Northfield MN Michael J. Valiska - Lakeville MN Clifford L. Taylor - Northfield MN
Assignee:
Viratec Thin Films, Inc. - Faribault MN
International Classification:
C23C 1434
US Classification:
20429811
Abstract:
A mask arrangement is located between the cathode and substrate in an in-line sputtering system. The relative shape of the mask may be changed from outside the system. Thus, film thickness uniformity can be modified and controlled without interrupting the sputtering process.
Method And Apparatus For Thin Film Coating An Article
Erik J. Bjornard - Northfield MN Clifford E. Taylor - Nerstrand MN Debra M. Steffenhagen - Santa Rosa CA Eric W. Kurman - Healdsburg CA
International Classification:
C23C 1434 C23C 1600 C23C 1654
US Classification:
20419212
Abstract:
A method, apparatus and carrier for coating a CRT screen after assembly. The method and apparatus includes isolating a surface portion of the CRT to be coated from the remaining surface to prevent or minimize coating problems resulting from outgassing or difficulty in controlling coating process parameters and to isolate noncompatible components from the deposition environment.
Anode Structures For Magnetron Sputtering Apparatus
Eric R. Dickey - Northfield MN Erik J. Bjornard - Northfield MN James J. Hoffmann - Boise ID
Assignee:
Viratec Thin Films, Inc. - Faribault MN
International Classification:
C23C 1434
US Classification:
20429814
Abstract:
An in-line sputtering system with rotating cylindrical magnetrons is fitted with a system of anodes having a large surface area. The surface area is equal to or greater than the surface area of the sputtering chambers' internal walls. The anodes may be grounded, allowed to float electrically, or connected to a separate bias power supply. The anode surfaces are protected from contamination by sputtered material or are designed so the electron collecting surface may be replaced during the sputtering process. The anodes may be equipped with a magnet array for improving electron collecting efficiency.
Rotating Magnetron Incorporating A Removable Cathode
David E. Stevenson - Northfield MN Erik J. Bjornard - Northfield MN Geoffrey Humberstone - Northfield MN
Assignee:
Viratec Thin Films, Inc. - Faribault MN
International Classification:
C23C 1435
US Classification:
20429822
Abstract:
A rotatable magnetron having a cathode and a bearing assembly wherein the cathode may be removed from a coating chamber while the bearing assembly remains in place.
Apple
Manager Process Engineering
Sageglass 2008 - Sep 2016
Senior Vice President Technology
Innoventor, Inc. 2008 - 2011
Partner
Bjornard Consulting 2004 - 2008
President
Viratec Thin Films 1998 - 2004
President
Education:
Glenbard South High School
University of Chicago
Bachelors, Bachelor of Science, Physics
Skills:
Thin Films Coatings Materials Process Engineering R&D Manufacturing Start Ups Leadership Product Development Strategy Design of Experiments Materials Science Six Sigma Solar Energy Engineering Semiconductors Optics Cross Functional Team Leadership Lean Manufacturing Sputtering Research and Development Strategic Thinking Strategic Planning Large Area Coating Innovation Operations
Languages:
English German
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