Abstract:
High purity, fine Si. sub. 3 N. sub. 4 powder produced by the vapor phase reaction of SiCl. sub. 4 with NH. sub. 3 is amorphous. The crystallization rate of the amorphous powder is enhanced by heating the powder while in intimate contact with a titanium containing material, for example, TiN codeposited with the Si. sub. 3 N. sub. 4 by the simultaneous reaction of TiCl. sub. 4 with NH. sub. 3.