Di Wu

Author:

Di Wu

ISBN #:

0395692504

US Patent:

7169231, Jan 30, 2007

Filed:

Dec 13, 2002

Appl. No.:

10/318612

Inventors:

Dean J. Larson - Pleasanton CA, US
Babak Kadkhodayan - Hayward CA, US
Di Wu - Newark CA, US
Kenji Takeshita - Fremont CA, US
Xingcai Su - Fremont CA, US
Peter Loewenhardt - Pleasanton CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

C23C 16/52
C23C 16/455
C23C 16/00
H01L 21/306

US Classification:

118715, 15634529, 15634533

Abstract:

An apparatus for providing different gases to different zones of a processing chamber is provided. A gas supply for providing an etching gas flow is provided. A flow splitter in fluid connection with the gas supply for splitting the etching gas flow from the gas supply into a plurality of legs is provided. A tuning gas system in fluid connection to at least one of the legs of the plurality of legs is provided.

US Patent:

7371332, May 13, 2008

Filed:

Aug 14, 2003

Appl. No.:

10/642083

Inventors:

Dean J. Larson - Pleasanton CA, US
Babak Kadkhodayan - Hayward CA, US
Di Wu - Newark CA, US
Kenji Takeshita - Fremont CA, US
Xingcai Su - Fremont CA, US
Peter Loewenhardt - Pleasanton CA, US

Assignee:

LAM Research Corporation - Fremont CA

International Classification:

H01L 21/306

US Classification:

216 58, 216 67, 15634529, 15634533

Abstract:

Etching a layer over a substrate is provided. The substrate is placed in a plasma processing chamber. A first gas is provided to an inner zone within the plasma processing chamber. A second gas is provided to the outer zone within the plasma processing chamber, where the outer zone surrounds the inner zone and the first gas is different than the second gas. Plasmas are simultaneously generated from the first gas and second gas. The layer is etched, where the layer is etched by the plasmas from the first gas and second gas.

US Patent:

20040112540, Jun 17, 2004

Filed:

Oct 14, 2003

Appl. No.:

10/685739

Inventors:

Dean Larson - Pleasanton CA, US
Babak Kadkhodayan - Hayward CA, US
Di Wu - Newark CA, US
Kenji Takeshita - Fremont CA, US
Xingcai Su - Fremont CA, US
William Denty - San Jose CA, US
Peter Loewenhardt - Pleasanton CA, US

Assignee:

Lam Research Corporation

International Classification:

H01L021/306

US Classification:

156/345330

Abstract:

An apparatus for providing a gas from a gas supply to at least two different zones in a process chamber is provided. A flow divider provides a fluid connection to the gas supply, where the flow divider splits gas flow from the gas supply into a plurality of legs. A master leg is in fluid connection with the flow divider, where the master leg comprises a master fixed orifice. A first slave leg is in fluid connection with the flow divider and in parallel with the master leg, where the first slave leg comprises a first slave leg valve and a first slave leg fixed orifice.

US Patent:

20080210377, Sep 4, 2008

Filed:

Mar 25, 2008

Appl. No.:

12/055212

Inventors:

Dean J. Larson - Pleasanton CA, US
Babak Kadkhodayan - Hayward CA, US
Di Wu - Newark CA, US
Kenji Takeshita - Fremont CA, US
Xingcai Su - Fremont CA, US
William M. Denty - San Jose CA, US
Peter Loewenhardt - Pleasanton CA, US

Assignee:

LAM RESEARCH CORPORATION - Fremont CA

International Classification:

C23F 1/08

US Classification:

15634529

Abstract:

Etching a layer over a substrate is provided. The substrate is placed in a plasma processing chamber. A first gas is provided to an inner zone within the plasma processing chamber. A second gas is provided to the outer zone within the plasma processing chamber, where the outer zone surrounds the inner zone and the first gas is different than the second gas. Plasmas are simultaneously generated from the first gas and second gas. The layer is etched, where the layer is etched by the plasmas from the first gas and second gas.

US Patent:

20130276877, Oct 24, 2013

Filed:

Mar 12, 2013

Appl. No.:

13/796902

Inventors:

Alberto Salleo - San Francisco CA, US
Di Meng Wu - Stanford CA, US

Assignee:

The Board of Trustees of the Leland Stanford Junior University - Palo Alto CA

International Classification:

H01L 31/0224

US Classification:

136256, 438 98

Abstract:

An up-converting electrode and a solar cell that combines the up-converting electrode are disclosed. The up-converting electrode comprises a material that up-converts light from longer wavelengths to shorter wavelengths and an electrically conductive material. The electrically conductive material increases the efficiency of the up-converting material such that more light is up-converted. The up-converting electrode can also serve as an electrical contact for the solar cell.

US Patent:

20220358141, Nov 10, 2022

Filed:

Jul 27, 2022

Appl. No.:

17/815375

Inventors:

- Bozeman MT, US
Benoit Dageville - San Mateo CA, US
Shreyas Narendra Desai - Bellevue WA, US
Sameer Deshpande - Mountain View CA, US
Subramanian Muralidhar - Mercer Island WA, US
Di Wu - Newark CA, US

International Classification:

G06F 16/27

Abstract:

Techniques for database replication using replication preparation objects include storing, by at least one hardware processor, at least one task object at a remote deployment of a data provider. A replication request originating from an account of a data consumer is detected at the remote deployment using the at least one task object. The replication request is associated with a database available at a primary deployment of the data provider. Responsive to the detecting of the replication request, a local instance of the database is generated at the remote deployment. The account of the data consumer at the remote deployment is configured to access the local instance of the database.

US Patent:

20220300532, Sep 22, 2022

Filed:

Sep 30, 2021

Appl. No.:

17/490543

Inventors:

- Bozeman MT, US
Benoit Dageville - San Mateo CA, US
Shreyas Narendra Desai - Bellevue WA, US
Sameer Deshpande - Mountain View CA, US
Subramanian Muralidhar - Mercer Island WA, US
Di Wu - Newark CA, US

International Classification:

G06F 16/27

Abstract:

Disclosed herein are systems and methods for database replication to a remote deployment with automated fulfillment. In an embodiment, a data platform provisions a remote-deployment account of a data provider at a remote deployment of the data platform with a set of one or more replication-preparation objects associated with a primary-deployment database that is resident in a primary-deployment account of the data provider at a primary deployment of the data platform. After the provisioning, the data platform detects receipt of a database-replication request associated with a data consumer, requesting availability of a local instance of the primary-deployment database in the remote-deployment account of the data provider. The data platform responsively performs one or more remote-deployment-activation operations, which makes available to the data consumer a local instance of the primary-deployment database in the remote-deployment account of the data provider at the remote deployment of the data platform.

US Patent:

20220300533, Sep 22, 2022

Filed:

May 11, 2022

Appl. No.:

17/662963

Inventors:

- Bozeman MT, US
Benoit Dageville - San Mateo CA, US
Shreyas Narendra Desai - Bellevue WA, US
Sameer Deshpande - Moutain View CA, US
Subramanian Muralidhar - Mercer Island WA, US
Di Wu - Newark CA, US

International Classification:

G06F 16/27
G06F 16/182

Abstract:

Techniques for database configurations for remote deployments include a method performed by a data platform executing instructions on at least one processor. The method includes provisioning by at least one hardware processor, a remote deployment of a data platform with a plurality of objects. The plurality of objects includes at least one task object associated with a primary deployment of the data platform. The method further includes detecting using the at least one task object of the plurality of objects, a request to replicate a database stored at the primary deployment of the data platform at the remote deployment. Responsive to the request, database data is pushed from the database stored at the primary deployment to at least a second object of the plurality of objects provisioned at the remote deployment.