- Santa Clara CA, US PENG SUO - SINGAPORE, SG SHIH-CHAO HUNG - SINGAPORE, SG PIN GIAN GAN - SINGAPORE, SG CHUN YU TO - SINGAPORE, SG PERIYA GOPALAN - SAN JOSE CA, US KOK SEONG TEO - SINGAPORE, SG LIT PING LAM - SINGAPORE, SG ANDY LOO - SINGAPORE, SG PANGYEN ONG - SINGAPORE, SG DAVID P. SURDOCK - KALISPELL MT, US KEITH YPMA - Kalispell MT, US BRIAN WILLIAMS - Kalispell MT, US SCOTT OSTERMAN - Whitefish MT, US MARVIN L. BERNT - KALISPELL MT, US MUHAMMAD NORHAZWAN - SINGAPORE, SG SAMUEL GOPINATH - SINGAPORE, SG MUHAMMAD AZIM - SINGAPORE, SG GUAN HUEI SEE - SINGAPORE, SG QI JIE PENG - SINGAPORE, SG SRISKANTHARAJAH THIRUNAVUKARASU - SINGAPORE, SG ARVIND SUNDARRAJAN - SINGAPORE, SG
International Classification:
B24B 57/00 H01L 21/02 B24B 37/34
Abstract:
Methods and apparatus for removing particles from a substrate surface after a chemical mechanical polish. In some embodiments, the apparatus may include a manifold configured to receive and atomize a fluid and at least one spray nozzle mounted to the manifold and configured to spray the atomized fluid in a divergent spray pattern such that the substrate surface is cleansed when impinged by spray from the at least one spray nozzle, wherein the at least one spray nozzle sprays the atomized fluid at a pressure of approximately 30 psi to approximately 2500 psi.
Jeffrey Chi Cheung - Hayward CA, US John Ghekiere - Marion MT, US Jerry D. Leonhard - Kalispell MT, US David P. Surdock - Kalispell MT, US Benjamin Shafer - Hungry Horse MT, US Ray Young - Kalispell MT, US
A substrate etching system includes a support to hold a wafer in a face-up orientation, a dispenser arm movable laterally across the wafer on the support, the dispenser arm supporting a delivery port to selectively dispense a liquid etchant onto a portion of a top face of the wafer, and a monitoring system comprising a probe movable laterally across the wafer on the support.