David D Burtner

US Patent:

7425711, Sep 16, 2008

Filed:

Jan 12, 2007

Appl. No.:

11/622966

Inventors:

David M. Burtner - Belmont MA, US
Scott A. Townsend - Fort Collins CO, US
Daniel E. Siegfried - Fort Collins CO, US

Assignee:

Veeco Instruments, Inc. - Woodbury NY

International Classification:

H01J 7/24
H01J 49/10

US Classification:

250426, 250423 R, 250424, 31511141, 31511181, 3133621

Abstract:

A thermal control plate is easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal control plate, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The thermal control plate may support a gas distributor and an anode in the anode assembly. The thermal control plate may have a port for passing working gas from one side of the thermal control plate to the other. An interface surface on the thermal control plate may have a pattern of recesses to allow the working gas to disperse underneath the gas distributor.

US Patent:

7439521, Oct 21, 2008

Filed:

Jan 12, 2007

Appl. No.:

11/622949

Inventors:

David M. Burtner - Belmont MA, US
Scott A. Townsend - Fort Collins CO, US
Daniel E. Siegfried - Fort Collins CO, US

Assignee:

Veeco Instruments, Inc. - Fort Collins CO

International Classification:

H01J 7/24
H01J 49/10

US Classification:

250423R, 250424, 250426, 31511141, 31511181, 3133621

Abstract:

An ion source has a removable anode assembly that is separable and from a base assembly to allow for ease of servicing the consumable components of the anode assembly. Such consumables may include a gas distributor, a thermal control plate, an anode, and one or more thermal transfer sheets interposed between other components. A pole piece and a cathode may also be part of the anode assembly. The anode assembly may be attached to the base assembly via the pole piece.

US Patent:

7476869, Jan 13, 2009

Filed:

Jan 12, 2007

Appl. No.:

11/622981

Inventors:

David M. Burtner - Belmont MA, US
Scott A. Townsend - Fort Collins CO, US
Daniel E. Siegfried - Fort Collins CO, US

Assignee:

Veeco Instruments, Inc. - Woodbury NY

International Classification:

H01J 49/10
H01J 37/08
H01J 7/24

US Classification:

250423R, 250424, 250426, 31511181, 31511191, 31511141, 3133621

Abstract:

A gas distributor is easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the gas distributor, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The gas distributor may be mounted to a thermal control plate in the anode assembly with several set screws. The gas distributor may be disk-shaped with counterbores in a surface to recess the heads of the set screws. Alternately, the gas distributor may be clamped or held in place by other structures or components of the ion source.

US Patent:

7566883, Jul 28, 2009

Filed:

Jan 12, 2007

Appl. No.:

11/622989

Inventors:

David M. Burtner - Belmont MA, US
Scott A. Townsend - Fort Collins CO, US
Daniel E. Siegfried - Fort Collins CO, US

Assignee:

Veeco Instruments, Inc. - Fort Collins CO

International Classification:

H01J 49/10
H01J 37/08
H01J 7/24

US Classification:

250423R, 250424, 250426, 31511141, 31511181, 3133621

Abstract:

One or more thermal transfer sheets are easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal transfer sheets, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The thermal transfer sheets may be interposed between the consumable components within the anode assembly. The thermal transfer sheets may be thermally conductive and either electrically insulating or conductive.

US Patent:

7914603, Mar 29, 2011

Filed:

Jun 26, 2008

Appl. No.:

12/147078

Inventors:

Ali Shajii - Canton MA, US
Xing Chen - Lexington MA, US
Andrew Cowe - Andover MA, US
David Burtner - Belmont MA, US
William Robert Entley - Wakefield MA, US
ShouQian Shao - Boston MA, US

Assignee:

MKS Instruments, Inc. - Andover MA

International Classification:

B01D 46/46

US Classification:

95 17, 55288, 55434, 554343, 55462, 55DIG 15, 553851, 95267, 95 25, 95272, 96221, 118723 R, 118723 ER, 20429807

Abstract:

A particle trap for a remote plasma source includes a body structure having an inlet for coupling to a chamber of a remote plasma source and an outlet for coupling to a process chamber inlet. The particle trap for a remote plasma source also includes a gas channel formed in the body structure and in fluid communication with the body structure inlet and the body structure outlet. The gas channel can define a path through the body structure that causes particles in a gas passing from a first portion of the channel to strike a wall that defines a second portion of the gas channel at an angle relative to a surface of the wall. A coolant member can be in thermal communication with the gas channel.