Curtis E Farrell

US Patent:

7771157, Aug 10, 2010

Filed:

Dec 27, 2001

Appl. No.:

10/034788

Inventors:

Curtis E. Farrell - Tucson AZ, US
Dennis D. Liu - Tucson AZ, US

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

B65G 65/34

US Classification:

414811, 414404

Abstract:

A wafer transfer machine transfers wafers from either of a first wafer cassette () and a second wafer cassette () having incompatible registration features into the other, and includes a support plate () having a top surface () for supporting the first and second wafer cassette. A first and second registration bosses attached to the top surface extend upward into registration features of the first and second wafer cassette, respectively. A carriage () is supported by and movable in opposite directions along a track mechanism (A,B) that is attached in fixed relationship to the support plate (). First and second wafer pushing members (A,B) are supported by the carriage. Each wafer pushing member can be moved to push wafers in one of the wafer cassettes into the other by moving the carriage in one direction or the other.