Clifford A Lebeau

US Patent:

7105376, Sep 12, 2006

Filed:

Jul 8, 2004

Appl. No.:

10/888178

Inventors:

Peter D. Brewer - Westlake Village CA, US
Clifford A. Lebeau - Newbury Park CA, US
Andrew T. Hunter - Woodland Hills CA, US

Assignee:

HRL Laboratories, LLC - Malibu CA

International Classification:

H01L 21/50
H01L 21/48
H01L 21/46

US Classification:

438107, 438455, 438800

Abstract:

A method and apparatus for transporting and dispersing microstructures on a substrate by fluidic self-assembly. The apparatus has an assembly vessel that is tilted and rotated to apply uncaptured microstructures back onto the substrate as the assembly vessel rotates. The assembly vessel has ramp structures that collect the microstructures that have not been captured by the substrate at the lower edge of the assembly vessel, carry the microstructures as the assembly vessel rotates, and release the microstructures back on to the substrate at the upper edge of the assembly vessel. Vibrational energy may also be applied to the assembly vessel to assist in the dispersal and location of the microstructures on the substrate.

US Patent:

54337917, Jul 18, 1995

Filed:

May 26, 1994

Appl. No.:

8/249423

Inventors:

Peter D. Brewer - Westlake Village CA
Clifford A. LeBeau - Newbury Park CA

Assignee:

Hughes Aircraft Company - Los Angeles CA

International Classification:

C23C 1600

US Classification:

118724

Abstract:

Ultraviolet (UV) light from a lamp or UV laser, such as a metal can short arc xenon lamp or excimer laser, respectively, is provided for cracking Group V and Group VI species comprising clusters (dimers and tetramers) or metal-organic molecules to form monomers (atoms). The UV radiation interacts with a molecular beam of Group V and Group VI species subsequent to their generation in a source cell and thermal cracking. The source cell may comprise an effusion source in molecular beam epitaxy (MBE) apparatus, a thermal cracker cell in gas-source MBE apparatus, or a gas injector cell in metal-organic MBE apparatus (MOMBE). Light from the UV lamp or laser is coupled into a vacuum chamber in which the source cell is located, at a point below the source cell and is then directed along a path parallel to the source cell by a first reflector and finally directed onto the thermally-cracked beam of molecules by a second reflector, where the UV radiation photo-cracks the molecular beam.