Christopher J John

US Patent:

20110180983, Jul 28, 2011

Filed:

Jan 25, 2011

Appl. No.:

13/013772

Inventors:

SANDHYA ARUN - Brookefields, IN
Prashanth Kodigepalli - Bangalore, IN
Padma Gopalakrishnan - Fremont CA, US
Ashish Bhatnagar - Fremont CA, US
Dan Martin - Cupertino CA, US
Christopher Heath John Hossack - Gilbert AZ, US

Assignee:

APPLIED MATERIALS, INC. - Santa Clara CA

International Classification:

B25B 1/00

US Classification:

269 86

Abstract:

The present invention generally relates to a ring assembly that may be used in an etching or other plasma processing chamber. The ring assembly generally includes an inner ring and an outer ring disposed radially outward of the inner ring. The inner ring will correspond to the location where the majority of erosion occurs during use. This inner ring can be flipped and reused until both sides have eroded beyond their service life. Collectively, the two rings generally have the shape of a single piece ring, but the service life of the ring assembly is longer than a conventional single piece ring.

US Patent:

20140238604, Aug 28, 2014

Filed:

May 6, 2014

Appl. No.:

14/270993

Inventors:

- Santa Clara CA, US
Prashanth KODIGEPALLI - Bangalore, IN
Padma GOPALAKRISHNAN - Fremont CA, US
Ashish BHATNAGAR - Fremont CA, US
Dan MARTIN - Cupertino CA, US
Christopher Heath John HOSSACK - Gilbert AZ, US

International Classification:

H01J 37/32

US Classification:

1563451

Abstract:

The present invention generally relates to a ring assembly that may be used in an etching or other plasma processing chamber. The ring assembly generally includes an inner ring body having a top planar surface and a bottom planar surface, and an outer ring body having a top surface, a bottom surface substantially parallel to the top surface, and an inside surface that extends between the top surface and the bottom surface, the inside surface having a roof covering a portion of the inner ring body when the inner ring body is disposed adjacent the roof, wherein the inner ring body can be flipped into a different position so that a portion of the inner ring body that is not covered by the roof provides a substantially planar surface.